Photolithography

Bandelier, Philippe; Charley, Anne-Laure; Lagrange, Alexandre

doi:10.1002/9781118557662.ch1

Cited by 3 publications

(4 citation statements)

References 28 publications

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“…2). This correlation might be explained by the optical proximity effect (OPE), which explains how the shape for a 2-D pattern fabricated using lithographic tools will depend on also the proximity of nearby features 10,[25][26][27] . For large features, the diffraction patterns of exposure do not strongly depend on the separation distance between the geometric shapes.…”

Section: Discussionmentioning

confidence: 99%

“…Hence, the lack of systematic quantification and documentation of these factors hamper the effective use of µCP in the biological sciences. The key steps involved in µCP are: (1) fabrication of stamps with the desired geometric size and shape using photolithography [8][9][10] and soft lithography 11,12 , (2) coating of the stamp with cytophilic molecules for immobilisation of cells, and (3) transfer of the cytophilic molecules onto the cytophobic substrate 13,14 . Figure 1 provides a graphical overview of the process in which µCP is used to fabricate a SCA.…”

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confidence: 99%

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Effect of design geometry, exposure energy, cytophilic molecules, cell type and load in fabrication of single-cell arrays using micro-contact printing

Bhujbal¹,

Dekov²,

Ottesen³

et al. 2020

Sci Rep

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In this study a range of factors influencing the fabrication of single-cell arrays (SCAs) are identified and investigated. Micro-contact printing was used to introduce spots coated with polyethyleneimine or Matrigel on glass surfaces pre-coated with polyethylene glycol. Unmodified E. coli, Synechococcus sp., Chlamydomonas reinhardtii as well as diverse mammalian cells including HUVEC, AAV293, U87, OHS, PC3, SW480, HepG2 and AY-27 were successfully immobilised onto the chemically coated spots. The developed SCAs show high cell viability and probability for capturing single-cells. A discrepancy between the size and shape of the squares described in the design file and the actual structures obtained in the final PDMS structure is characterised and quantified. The discrepancy is found to be depending on the exposure energy used in the photolithography process as well as the size of the squares and their separation distance as detailed in the design file. In addition to these factors, the effect of the cell density loaded onto the patterned surfaces is also characterised. The systematic characterisation of key parameters that need to be optimised prior to the fabrication of SCAs is essential in order to increase the efficiency and reproducibility of future fabrication of SCAs for single-cell studies.

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Section: Discussionmentioning

confidence: 99%

mentioning

confidence: 99%

Effect of design geometry, exposure energy, cytophilic molecules, cell type and load in fabrication of single-cell arrays using micro-contact printing

Bhujbal¹,

Dekov²,

Ottesen³

et al. 2020

Sci Rep

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“…33−35 Importantly, it utilizes a digital micromirror device (DMD) 32,36 as a dynamic mask, thus replacing the need of a prefabricated static photomask. 37 Furthermore, a dynamic mask, such as this, enables much greater control over shape and mechanical properties of the projected pattern on a submicron resolution and does not require the fabrication of a single-purpose mask or the time constraints of single pixel fabrication. 38,39 Creation of a silk-based solution prior to patterning is traditionally achieved through reconstitution; a process where spun silk is exposed to chaotropic agents to enable resolubilization.…”

Section: ■ Introductionmentioning

confidence: 99%

“…To address such challenges, we present projection microstereolithography (PμSL) − as a new route for high resolution silk patterning. PμSL is a 3D printing technique based on photocuring a (bio)polymer solution. − Importantly, it utilizes a digital micromirror device (DMD) , as a dynamic mask, thus replacing the need of a prefabricated static photomask . Furthermore, a dynamic mask, such as this, enables much greater control over shape and mechanical properties of the projected pattern on a submicron resolution and does not require the fabrication of a single-purpose mask or the time constraints of single pixel fabrication. , …”

Section: Introductionmentioning

confidence: 99%

Dynamic Photo-cross-linking of Native Silk Enables Macroscale Patterning at a Microscale Resolution

Brif

Laity

Claeyssens

et al. 2019

ACS Biomater. Sci. Eng.

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Light-based structuring methods have shown reconstituted silk to be a versatile and appropriate material for a range of optical and biomaterial-based applications. However, without an understanding of how an unmodified, native, silk responds to photo-processing, the full potential of this material cannot be realized. Here, we show that the use of native silk enables the production of compound patterns with improved resolution and image quality when quantitatively compared to standard reconstituted silk, which we link directly to the influence of molecular weight. Further insights into the mechanism behind silk structure development are provided through mechanical (rheological) and structural (FTIR) measurements and results show that processing can tune properties over several orders of magnitude, enabling potential replication of several soft tissue types. Finally, broadening our application perspective, this combination of mask-less lithography and native silk resulted in the fabrication of transparent optical elements for data storage and labeling.

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Self-organized ordered silver nanoparticle arrays obtained by solid state dewetting

Bris

Maloum

Teisseire

et al. 2014

Applied Physics Letters

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Spontaneous dewetting of a silver layer on a templated silica substrate is proposed as a promising low-cost process to produce self-organized metallic nanostructures. Periodic gratings with inverted pyramid pattern and periods ranging from 200 to 1000 nm are fabricated by nanoimprint on a sol-gel silica layer. A silver layer is then deposited on the templated substrate by magnetron sputtering and annealed to form an array of well-organized islands by solid-state dewetting. The resulting islands are shown to have reduced diameter and size dispersion compared to arrays obtained in the same conditions on flat substrates. The density of defects in the periodic array is determined as a function of silver layer thickness and is lower than 10% in optimal conditions. Optical transmission spectra of periodic arrays are measured, showing extinction peaks that can be related to plasmon resonance. This resonance can be tuned by adjusting the period and particle diameter.

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Photolithography

Cited by 3 publications

References 28 publications

Effect of design geometry, exposure energy, cytophilic molecules, cell type and load in fabrication of single-cell arrays using micro-contact printing

Effect of design geometry, exposure energy, cytophilic molecules, cell type and load in fabrication of single-cell arrays using micro-contact printing

Dynamic Photo-cross-linking of Native Silk Enables Macroscale Patterning at a Microscale Resolution

Self-organized ordered silver nanoparticle arrays obtained by solid state dewetting

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