“…The ability to alter the chemical reactivity of the “R” pendant groups through exposure to UV light, − electron or ion − beams, or plasmas or low-energy electrons generated using proximal probes , represents an additional advantage in that it provides a means to create spatially well-defined reactivity templates in the organosiloxane SAM. Si−C bond cleavage predominates during exposure for many, ,,, although not all, , organosiloxane SAMs studied to date, leading to formation of reactivity templates comprised of separate regions of intact pendant “R” groups and surface silanol species. Such simple templates have proven effective for the fabrication of biosensors − and microelectronic circuitry …”