Abstract:Composition, crystallographic quality and low temperature photoluminescence of AlGaInP quaternary layers were studied. These layers were grown on the InGaP/GaP graded buffers by metalorganic vapour phase epitaxy. Final composition of the graded buffer top layer was x In = 0.24. Incorporation of the small amount Al into quaternary led to a substantial improvement of the surface morpohology and crystallographic quality observed in cross-sectional TEM view. Incorporation of higher amount of Al (above 1% ) led to … Show more
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