Photoluminescence from RF sputtered SiCBN thin films

Vijayakumar, Arun; Warren, Andrew P.; Todi, Ravi M.; Sundaram, Kalpathy B.

doi:10.1007/s10854-008-9667-4

Cited by 11 publications

(8 citation statements)

References 23 publications

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“…Results from theoretical calculation suggest that the electrical and optical property variation of the as-deposited film may be related to the doping of nitrogen atoms, which may split the valence bond of atoms. Additionally, the Si-B-C-N film also exhibits other physical or thermal properties, such as photoluminescence, small thermal conductivity and thermal expansion coefficient [24].…”

Section: Electrical and Optical Properties Of Thementioning

confidence: 99%

“…has the characteristic of semiconductor, photoluminescence or light transmission [24]. The Si-B-C-N film may be applied in high-temperature photoelectron circuit, communication or control device.…”

Section: Applications Of the Si-b-c-n Film Prepared By Reactive Magnementioning

confidence: 99%

“…In 2005, Vlcek et al prepared an amorphous Si-B-C-N film on silicon substrate by a reactive magnetron sputtering technique [21]. The as-deposited film has a smooth surface, high hardness, high structural stability, nice oxidation resistance, controllable electrical resistance and even photoluminescence property [22][23][24]. In 2007, Yang et al developed the mechanical alloying plus sintering method to prepare Si-B-C-N bulk ceramic [25].…”

Section: Introduction To Si-b-c-n Ceramicmentioning

confidence: 99%

“…Currently, important researchers and institutes in the study of Si-B-C-N ceramic, prepared by the organic polymer pyrolyzing route, include Aldinger F, Weinmann M, Bill J, and Seifert H J, et al [28][29][30], in Universitat Stuttgart and Max-Planck-Institut fur Metallforschung, Germany; Riedel R et al [31], in Technische Universitat Darmstadt, Germany; Jansen M et al [32], in Universitat Bonn, Germany; Sneddon L G et al [33], in University of Pennsylvania, USA; Kim D P et al [34], in Chungnam National University, South Korea; and Nesper R et al [35], in ETH Zurich, Switzerland. Researchers, employing the reactive magnetron sputtering technique to prepare Si-B-C-N film, mainly include Vlcek J et al [36], in University of West Bohemia, Czech Republic and Vijayakumar A et al [24], in University of Central Florida, USA. In recent years, Jia D C et al [37,38], in Harbin Institute of Technology, China, developed the mechanical alloying plus sintering method to prepare Si-B-C-N bulk ceramic.…”

Section: Introduction To Si-b-c-n Ceramicmentioning

confidence: 99%

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Progress of a novel non-oxide Si-B-C-N ceramic and its matrix composites

et al. 2012

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Abstract:In the past twenty years, Si-B-C-N ceramic has attracted wide attention due to its special structure and outstanding properties. The ceramic generally has an amorphous or a nano-crystalline structure, and has excellent structural stability, oxidation resistance, creep resistance and high-temperature mechanical properties, etc. Thus, Si-B-C-N ceramic attracts many researchers and finds potential applications in transportation, aerocraft, energy, information, microelectronics and environment, etc. Much work has been carried out on its raw materials, preparation processes, structural evolution, phase equilibrium and high-temperature properties. In recent years, many researchers focus on its new preparation methods, the preparation of dense ceramic sample with large dimensions, ceramic matrix composites reinforced by carbon fiber or SiC whisker, or components with various applications. Research on Si-B-C-N ceramic will develop our insight into the relationship between structures and properties of ceramics, and will be helpful to the development of novel high-performance ceramics. This paper reviews the preparation processes, general microstructures, mechanical, chemical, electrical and optical properties, and potential applications of Si-B-C-N ceramic, as well as its matrix composites.

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Section: Electrical and Optical Properties Of Thementioning

confidence: 99%

Section: Applications Of the Si-b-c-n Film Prepared By Reactive Magnementioning

confidence: 99%

Section: Introduction To Si-b-c-n Ceramicmentioning

confidence: 99%

Section: Introduction To Si-b-c-n Ceramicmentioning

confidence: 99%

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Progress of a novel non-oxide Si-B-C-N ceramic and its matrix composites

et al. 2012

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“…Therefore, these luminescence peaks could be an effect of alloying of BN and SiN. 39) The luminescence originates in band to band transitions (more precisely, transitions between tails in energy bands) and band (band tail) to discrete level transitions; the discrete levels originate in structure defects. 41) Most likely, the luminescent centers can be attributed to the band tail recombination.…”

Section: Final Ceramicmentioning

confidence: 99%

Borazine-type single source precursor with vinyl to SiBCN ceramic

Chen

et al. 2018

J. Ceram. Soc. Japan

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A single source precursor of borazine derivative (B{NH[Si(CH 3) 2 CH=CH 2 ]}NH) 3 (TSAB) was designed for electronic applications. The result of thermo gravimetric analysis combined with mass spectrometry shows a ceramic yield of 60.7%. The X-ray photo-electron spectroscopy confirms that the siliconboron carbonitride (SiBCN) ceramic is obtained. The powder X-ray diffraction pattern and Raman spectra show that the graphite and a little hexagonal BN are formed after pyrolysis at 1500°C. The room temperature conductivity increases with the pyrolysis temperature, the highest is approximately 10 ¹4 (³•cm) ¹1 for SiBCN ceramic from cured TSAB pyrolyzed at 1500°C. Photoluminescence is observed in the visible range. The peaks appear at 417, 466, 498, and 593 nm (2.97, 2.66, 2.49, and 2.09 eV, respectively).

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Fabrication and Characterization of Carbon Nitride Fluorescent Material Using Annealed Melamine

Wada

Ohtani

2019

Physica Status Solidi (b)

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Fluorescent carbon nitride (CN) thin films are fabricated by annealing melamine powder. Four kinds of fabrication methods are tested: (1) annealing melamine powder on glass substrate; (2) annealing spin-coated melamine powder in acetic acid solution on glass substrate; (3) annealing melamine powder in a test tube and evaporating on a glass substrate; (4) spin-coating annealed melamine powder in acetic acid and nitric acid solutions on glass substrates. As a result, method (1) produces fluorescent CN grains when the annealing temperature was over 400 C. Photoluminescence (PL) peaking wavelength is redshifted with an increase of the annealing temperature. However, flat CN thin films cannot be produced. Method (2) cannot produce CN-based thin films; only small particles are found on substrates. Method (3) can drastically improve the surface roughness and produce flat CN thin films. Finally, the method (4) demonstrates that the PL peaking wavelength is blueshifted by nitric acid. Fourier-transform infrared (FT-IR) observation suggests that the protons supplied from nitric acid connect with carbon atoms in carbonyl, generating aldehydes and changing the PL properties.

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Photoluminescence from RF sputtered SiCBN thin films

Cited by 11 publications

References 23 publications

Progress of a novel non-oxide Si-B-C-N ceramic and its matrix composites

Progress of a novel non-oxide Si-B-C-N ceramic and its matrix composites

Borazine-type single source precursor with vinyl to SiBCN ceramic

Fabrication and Characterization of Carbon Nitride Fluorescent Material Using Annealed Melamine

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