2005
DOI: 10.1117/12.621366
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Photoluminescence study of (Er3++ Yb3+) doped gallium nitride layers fabricated by magnetron sputtering

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“…The structure of GaN layers fabricated by magnetron sputtering was investigated by X-ray diffraction and it was found that the samples had amorphous structure (for more details see [11]). The compositions of the fabricated samples were determined by nuclear chemical analysis as Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA).…”
Section: Resultsmentioning
confidence: 99%
“…The structure of GaN layers fabricated by magnetron sputtering was investigated by X-ray diffraction and it was found that the samples had amorphous structure (for more details see [11]). The compositions of the fabricated samples were determined by nuclear chemical analysis as Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA).…”
Section: Resultsmentioning
confidence: 99%