2013
DOI: 10.1364/oe.21.032623
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Photonic crystal cavities in cubic (3C) polytype silicon carbide films

Abstract: We present the design, fabrication, and characterization of high quality factor (Q ~10(3)) and small mode volume (V ~0.75 (λ/n)(3)) planar photonic crystal cavities from cubic (3C) thin films (thickness ~200 nm) of silicon carbide (SiC) grown epitaxially on a silicon substrate. We demonstrate cavity resonances across the telecommunications band, with wavelengths from 1.25 - 1.6 μm. Finally, we discuss possible applications in nonlinear optics, optical interconnects, and quantum information science.

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Cited by 73 publications
(72 citation statements)
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“…Q factors of > 10 9 have been simulated in these structures [32], with Q factors as high as 7.5 × 10 5 demonstrated on a Si platform [31]. Another advantage of 1D periodic structures is that they maintain a photonic band gap with lower index contrast than is possible for 2D planar photonic crystals, and therefore can still exhibit high Q factor modes on very low refractive index materials such as SiO 2 [33], diamond [34], Si 3 N 4 [35], sputter coated AlN [36] and SiC [37]. Moreover, in general a larger photonic band gap can be achieved in 1D than in 2D periodic structures, as one is only optimizing the band gap in one dimension.…”
Section: Introductionmentioning
confidence: 99%
“…Q factors of > 10 9 have been simulated in these structures [32], with Q factors as high as 7.5 × 10 5 demonstrated on a Si platform [31]. Another advantage of 1D periodic structures is that they maintain a photonic band gap with lower index contrast than is possible for 2D planar photonic crystals, and therefore can still exhibit high Q factor modes on very low refractive index materials such as SiO 2 [33], diamond [34], Si 3 N 4 [35], sputter coated AlN [36] and SiC [37]. Moreover, in general a larger photonic band gap can be achieved in 1D than in 2D periodic structures, as one is only optimizing the band gap in one dimension.…”
Section: Introductionmentioning
confidence: 99%
“…More recently 3C-SiC polytype is used for better integration with Si photonics, by heteroepitaxial growth on sacrificial Si substrate, allowing for direct patterning without ion implantation damage. With this method, an L3 PhC cavity has been fabricated in a thin-film (200 nm) 3C-SiC slab, obtaining Q-factor of 1,000 and modal volume of 0.75(λ/n) 3 over the band between 1250 and 1600 nm in the telecom IR range [22]. The possibility to incorporate colour centres with optically addressable spins similar to NV centres in diamond has been shown by fabricating H1 and L3 PhC cavities in 300-nm-thick 3C-SiC, as shown in Figure 12, with experimental Q of 1,000 for the strongly coupled cavity and (λ/n) 3 mode volume, tuned to the zero phonon line of the Ky5 colour Advanced Silicon Carbide Devices and Processing Figure 11.…”
Section: Sic Photonics Cavitiesmentioning
confidence: 99%
“…We will review single-photon emission from nanostructures of silicon carbide [18,19]. We will review recent nanophotonics advances [20][21][22][23][24][25][26][27][28][29][30] in this material to achieve defect integration and enhancement. Other applications of the engineered defects in quantum technologies are also summarised.…”
Section: Introductionmentioning
confidence: 99%
“…Photonic bandgap (PBG) materials which are also known as PhCs, offer a medium of achieving strong photon confinement in volumes on the order of (λ/n) 3 , where λ is the photon wavelength and n is the refractive index of the host material [1][2][4][5][6].…”
Section: Introductionmentioning
confidence: 99%