2014
DOI: 10.1117/12.2069335
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Photonic curvilinear data processing

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Cited by 2 publications
(2 citation statements)
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“…During the fracturing phase, where the flattened layout data is converted into writing patterns for the photomask (or direct e‐beam writer) the polygon data is again converted, depending on the writing strategy and the original data format. This can again introduce discretisation and staircasing . Customized writing strategies can reduce these effects, but today they always start from polygon data that is already an approximation of the intended design.…”
Section: Opportunitiesmentioning
confidence: 99%
“…During the fracturing phase, where the flattened layout data is converted into writing patterns for the photomask (or direct e‐beam writer) the polygon data is again converted, depending on the writing strategy and the original data format. This can again introduce discretisation and staircasing . Customized writing strategies can reduce these effects, but today they always start from polygon data that is already an approximation of the intended design.…”
Section: Opportunitiesmentioning
confidence: 99%
“…Lines 18-29 initialize a variety of variables used to create the arrayed structures. The nested for loop (lines [31][32][33][34][35][36][37][38][39][40] iterates through diameters and separations between circular array elements. In the inner loop, a pitch is calculated in line 33.…”
Section: Labeled Arraysmentioning
confidence: 99%