Photonic trimming of quantum emitters via direct fabrication of metallic nanofeatures

Li, Xin; Su, Rongling; Zhou, Zhang‐Kai; Yu, Ying; Falco, Andrea Di

doi:10.1063/1.5034314

Cited by 3 publications

(3 citation statements)

References 43 publications

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“…For the three Pt-based nanopillars (left low corner in Figure 2), it is worth mentioning no significant change in the lifetime was detected, meaning that a plasmonic coupling between the quantum emitter and the deposited structure can be ruled out: this is likely due to the latter's relatively small Pt content (around 30% with the used deposition parameters), resonance frequency, and the distance of the buried QD from the surface that prevents efficient overlapping of the QD's dipole with the mode sustained by the antenna. As plasmonic effects have already been achieved using the same deposition technique, 28 we believe that this unsatisfactory performance can be mostly ascribed to the planarization technique hereby employed, which provides limited control over the dot's final distance from the surface.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

“…By means of 3D scanning of the electron beam, EBID allows for the local deposition of a target material and the fabrication of complex nanofeatures while retaining the typical resolution of EBL, , with the additional benefit of a remarkable flexibility in terms of material choice: both oxides, such as SiO 2 , and metals, such as Pt and Au, can be deposited in a single processing run by interchanging gases. This paves the way for a direct deposition of hard masks to be used in subsequent dry etching steps or of plasmonic and dielectric nanostructures aimed at improving light extraction efficiency and/or tailoring of the emitters’ properties …”

Section: Introductionmentioning

confidence: 99%

“…This paves the way for a direct deposition of hard masks to be used in subsequent dry etching steps or of plasmonic 26 and dielectric nanostructures aimed at improving light extraction efficiency 27 and/or tailoring of the emitters' properties. 28 Here we carry out a study of the possible applications of the EBID technique for the most widely used starting configuration of an epitaxial quantum dot sample, that is, a planar semiconductor membrane with embedded quantum dots.…”

Section: ■ Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Planar Semiconductor Membranes with Brightness Enhanced Embedded Quantum Dots via Electron Beam Induced Deposition of 3D Nanostructures: Implications for Solid State Lighting

Varo

Juška

et al. 2020

ACS Appl. Nano Mater.

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The engineering of the surrounding photonic environment is one of the most successful approaches routinely used to increase light extraction efficiency and tune the properties of solid state sources of quantum light. However, results achieved so far have been hampered by the lack of a technology that allows for the straightforward fabrication of large scale 3D nano-and microfeatures, with very high resolution and sufficient flexibility in terms of available materials. In this paper we show that Electron Beam Induced Deposition can be a very promising approach to solve this issue, as exemplified by the fabrication of Pt and SiO 2 nanofeatures on a membrane containing ordered arrays of site-controlled pyramidal quantum dots. Micro-photoluminescence has been used to compare the emission of the dots before and after the deposition of the structures, remarkably showing both a significant increase in the light extraction efficiency and no degradation of the spectral quality, implying that negligible damage has been caused to the emitter due to the deposition process. This paves the way for novel post-growth processing strategies for epitaxial quantum dots used in both quantum information technologies and lighting applications.

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Section: ■ Results and Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: ■ Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Planar Semiconductor Membranes with Brightness Enhanced Embedded Quantum Dots via Electron Beam Induced Deposition of 3D Nanostructures: Implications for Solid State Lighting

Varo

Juška

et al. 2020

ACS Appl. Nano Mater.

Self Cite

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A Review on Direct‐Write Nanoprinting of Functional 3D Structures with Focused Electron Beams

Reisecker,

Winkler,

Plank

2024

Adv Funct Materials

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Following Moore`s law, the performance of devices should double within a two‐year span, which can either be done by reducing the size of the individual components or adapting the working mechanism. In most cases the same mantra applies – pushing the size while keeping the quality. As manufacturing techniques are approaching the atomic scale, however, miniaturization reaches its intrinsic limit, shifting focus toward higher‐dimensional architectures realized by stacking planar layers or fabricating true, free‐standing nanostructures. A mask‐less, additive manufacturing technique with the capability to produce such 3D structures at the nanoscale is called Focused Electron Beam Induced Deposition (FEBID). Applying a focused electron beam in a conventional scanning electron microscope together with a gaseous metal‐precursor gives access to a vast library of complex, 3D nanostructures, which exhibit feature sizes down to the 10 nm‐range and can be printed in a single step on most substrates. This review aims at introducing the technique to a broader scientific community, breaking down the most important processing routes and highlighting disciplines explored so far ranging from nanooptics and nanomagnetism, over scanning probes and field emitters to sensing and particle trapping. Finally, a future roadmap of the technique is discussed, and prospective research focus identified.

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Deterministic integration of single nanowire devices with on-chip photonics and electronics

Jevtics

Guilhabert

Hurtado

et al. 2022

Progress in Quantum Electronics

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Photonic trimming of quantum emitters via direct fabrication of metallic nanofeatures

Cited by 3 publications

References 43 publications

Planar Semiconductor Membranes with Brightness Enhanced Embedded Quantum Dots via Electron Beam Induced Deposition of 3D Nanostructures: Implications for Solid State Lighting

Planar Semiconductor Membranes with Brightness Enhanced Embedded Quantum Dots via Electron Beam Induced Deposition of 3D Nanostructures: Implications for Solid State Lighting

A Review on Direct‐Write Nanoprinting of Functional 3D Structures with Focused Electron Beams

Deterministic integration of single nanowire devices with on-chip photonics and electronics

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