Photopatternable nano-composite (SU-8/ZnO) thin films for piezo-electric applications

Kandpal, Manoj; Sharan, Chandrashekhar; Poddar, Pankaj; Prashanthi, K.; Apte, P. R.; Rao, V. Ramgopal

doi:10.1063/1.4748575

Cited by 59 publications

(45 citation statements)

References 42 publications

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“…Th e performance of SU-8 based polymer nanomechanical sensors could be enhanced by incorporating ultra-sensitive electrical transduction schemes that are compatible with SU-8 processing [23][24][25][26][27][28][29][30][31][32]. Design and development of SU-8 microcantilever sensors with four novel electrical transduction schemes namely (1) polymer nanocomposite piezoresistive microcantilever sensors [25][26][27] (2) Organic CantiFET [28] (3) AZO CantiFET [29] and (4) polymer nanocomposite piezoelectric microcantilever sensors [30][31][32] are discussed here.…”

Section: Introductionmentioning

confidence: 99%

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Polymer MEMS Sensors

Seena

Ray

Prashanthi

et al. 2014

Advanced Biomaterials and Biodevices

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Th e evolution of today's sensors based on the micro/nano electromechanical systems (MEMS/NEMS) happened due to the revolutions in the well-established microelectronics technology. Th ough silicon is considered to be the primary material in microelectronics and hence in MEMS, many classes of MEMS devices have been realized using other potential materials like polymers. A class of MEMS sensors named nanomechanical cantilevers fi nd applications in the realization of many physical, chemical, and biological sensors. Improved sensitivity, reliability and also cost eff ectiveness of such sensor platforms have been achieved by the use of polymer materials, along with the employment of smart and compatible transduction techniques. Th is chapter summarizes our research work on development of polymer MEMS cantilever sensor platforms with four novel integrated electrical transduction mechanisms. In these techniques, the mechanical parameters of the polymer (SU-8) MEMS sensors can be translated into electrical output using (1) SU-8/CB nanocomposite (a piezoresistive approach), (2)integrated organic fi eld eff ect transistor of CantiFET (a strain sensitive transistor approach), (3) integrated Al doped ZnO TFT (a strain sensitive thin fi lm transistor approach) or (4) SU-8/ ZnO nanocomposite ( a piezoelectric approach).

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Section: Introductionmentioning

confidence: 99%

“…Design and development of SU-8 microcantilever sensors with four novel electrical transduction schemes namely (1) polymer nanocomposite piezoresistive microcantilever sensors [25][26][27] (2) Organic CantiFET [28] (3) AZO CantiFET [29] and (4) polymer nanocomposite piezoelectric microcantilever sensors [30][31][32] are discussed here.…”

Section: Introductionmentioning

confidence: 99%

Polymer MEMS Sensors

Seena

Ray

Prashanthi

et al. 2014

Advanced Biomaterials and Biodevices

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“…The matrix, SU8, is a negative photoresist, commonly employed in microfabrication, and nanocomposites with SU8 as matrix have been used to fabricate structural components of MEMS sensors [48][49][50][51][52]. The mechanical properties of this polymer depend on the processing conditions.…”

Section: Materials Propertiesmentioning

confidence: 99%

Evaluation of Effective Elastic, Piezoelectric, and Dielectric Properties of SU8/ZnO Nanocomposite for Vertically Integrated Nanogenerators Using Finite Element Method

Mishra

Krishna

Singh

et al. 2017

Journal of Nanomaterials

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A nanogenerator is a nanodevice which converts ambient mechanical energy into electrical energy. A piezoelectric nanocomposite, composed of vertical arrays of piezoelectric zinc oxide (ZnO) nanowires, encapsulated in a compliant polymeric matrix, is one of most common configurations of a nanogenerator. Knowledge of the effective elastic, piezoelectric, and dielectric material properties of the piezoelectric nanocomposite is critical in the design of a nanogenerator. In this work, the effective material properties of a unidirectional, unimodal, continuous piezoelectric composite, consisting of SU8 photoresist as matrix and vertical array of ZnO nanowires as reinforcement, are systematically evaluated using finite element method (FEM). The FEM simulations were carried out on cubic representative volume elements (RVEs). Four different types of arrangements of ZnO nanowires and three sizes of RVEs have been considered. The volume fraction of ZnO nanowires is varied from 0 to a maximum of 0.7. Homogeneous displacement and electric potential are prescribed as boundary conditions. The material properties are evaluated as functions of reinforcement volume fraction. The values obtained through FEM simulations are compared with the results obtained via the Eshelby-MoriTanaka micromechanics. The results demonstrate the significant effects of ZnO arrangement, ZnO volume fraction, and size of RVE on the material properties.

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“…A growing number of polymer based microdevices, mainly applied in microfluidics, can be found in the literature [1][2][3][4][5][6]. The growing interest in polymer based MEMS [7] has driven the development of novel processes and protocols to control its mechanical [8][9][10], optical [11], magnetic [12][13][14], and electrical [15][16][17] properties. Also the surface chemistry [18], the resolution attainable during optical lithography [19], and the topographical features were intensively studied.…”

Section: Introductionmentioning

confidence: 99%

Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures

Alarcón

Martínez

Rodríguez

et al. 2016

Advances in Materials Science and Engineering

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During SU-8 standard photolithography process, a patterned topography is formed with a characteristic height profile produced by the different shrinkage of the UV exposed and masked regions. We study the change of wettability, film solubility, and topographic modifications on SU-8 films of different thicknesses and show its relevance in the formation of spinning-flow arrays on top layers made from positive photoresists. Also, considerable contrast in film solubility and surface energy as observed from contact angle measurements is produced. Interface diffusion of the photoresists was also observed and followed by Rutherford Back Scattering. We discuss the derivations of the mentioned effects concerning the limitations to multilayered microfabrication processes and possibilities to take advantage of the surface profiles obtained.

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Photopatternable nano-composite (SU-8/ZnO) thin films for piezo-electric applications

Cited by 59 publications

References 42 publications

Polymer MEMS Sensors

Polymer MEMS Sensors

Evaluation of Effective Elastic, Piezoelectric, and Dielectric Properties of SU8/ZnO Nanocomposite for Vertically Integrated Nanogenerators Using Finite Element Method

Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures

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