Photoresist Deposition and Nickel Electrodeposition for Metallic Substrate Microfabrication with Nickel Lines

Abstract

Metallic masters can be used as a metallic mold to replicate polymeric pieces with high resolution. Metallic masters with high resolution were created by photolithography technique and nickel electrodeposition technique. AZ 9260 photoresists and SPR 220-7.0 photoresists were used to coat metallic substrates and to compare results. Steel substrate and nickel substrate were used as the metallic substrate to compare results. Two different nickel electrodeposition protocols were used to compare results. In the conclusion section, was determined the best photoresist, metallic substrate, and nickel electrodeposition protocol to fabricate metallic masters.