Photoresist systems in floating T-gate fabrication for GaN high electron mobility transistors

Xiang, Shi Li; Ding, Qi-Chao; Liu, Jun; Hu, Hao; Zhao, Bo; Lu, Shuang Zan; Huang, Fan; Cunha, Joao; Rodrigues, José; Yu, Zhipeng; Yin, Hong

doi:10.1016/j.nanoms.2024.09.006

Nano Materials Science

2024

DOI: 10.1016/j.nanoms.2024.09.006

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Photoresist systems in floating T-gate fabrication for GaN high electron mobility transistors

Shi Li Xiang,

Qi-Chao Ding,

Jun Liu

et al.

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Photoresist systems in floating T-gate fabrication for GaN high electron mobility transistors

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References 74 publications

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