Photosensitive thin film materials and devices

Simmons-Potter, K.; Potter, B. G.; Meister, D. C.; Sinclair, Michael B.

doi:10.1016/s0022-3093(98)00724-8

Cited by 5 publications

(4 citation statements)

References 15 publications

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“…A1. 3 shows, a ratchet gear was 16 fabricated at 1.69 mm/s and 5-micron layer decrements. The gear is both dimensionally accurate and has little recast material.…”

Section: A12 Comparison Of Parameter Sets For Component Fabricationmentioning

confidence: 99%

“…It is well known that waveguides created on the surface of a photosensitive germanosilicate glass by a short wavelength excimer laser disappear when laser-induced defects are removed at a higher temperature (> 550°). 16 In contrast, waveguides created by the femtosecond laser remain intact after the same thermal treatment. The ability to create a "permanent" index refraction change by a femtosecond laser has fueled a thrust of research and development activities to fabricate integrated optical devices.…”

Section: A231 Effects Of Polarization Onmentioning

confidence: 99%

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Microfabrication with femtosecond laser processing : (A) laser ablation of ferrous alloys, (B) direct-write embedded optical waveguides and integrated optics in bulk glasses.

Guo¹,

McDaniel²,

Palmer³

et al. 2004

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At Sandia National Laboratories, miniaturization dominates future hardware designs, and technologies that address the manufacture of micro-scale to nano-scale features are in demand. Currently, Sandia is developing technologies such as photolithography/etching (e.g. silicon MEMS), LIGA, micro-electro-discharge machining (micro-EDM), and focused ion beam (FIB) machining to fulfill some of the component design requirements. Some processes are more encompassing than others, but each process has its niche, where all performance characteristics cannot be met by one technology. For example, micro-EDM creates highly accurate micro-scale features but the choice of materials is limited to conductive materials. With silicon-based MEMS technology, highly accurate nano-scale integrated devices are fabricated but the mechanical performance may not meet the requirements. Femtosecond laser processing has the potential to fulfill a broad range of design demands, both in terms of feature resolution and material choices, thereby improving fabrication of micro-components.One of the unique features of femtosecond lasers is the ability to ablate nearly all materials with little heat transfer, and therefore melting or damage, to the surrounding material, resulting in highly accurate micro-scale features. Another unique aspect to femtosecond radiation is the ability to create localized structural changes thought nonlinear absorption processes. By scanning the focal point within transparent material, we can create three-dimensional waveguides for biological sensors and optical components.In this report, we utilized the special characteristics of femtosecond laser processing for microfabrication. Special emphasis was placed on the laser-material interactions to gain a science-based understanding of the process and to determine the process parameter space for laser processing of metals and glasses. Two areas were investigated, including laser ablation of ferrous alloys and direct-write optical waveguides and integrated optics in bulk glass. The effects of laser and environmental parameters on such aspects as removal rate, feature size, feature definition, and ablation angle during the ablation process of metals were studied. In addition, the manufacturing requirements for component fabrication including precision and reproducibility were investigated. The effect of laser processing conditions on the optical properties of direct-4 written waveguides and an unusual laser-induced birefringence in an optically isotropic glass are reported. Several integrated optical devices, including a Y coupler, directional coupler, and Mach-Zehnder interferometer, were made to demonstrate the simplicity and flexibility of this technique in comparison to the conventional waveguide fabrication processes.

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“…A1. 3 shows, a ratchet gear was 16 fabricated at 1.69 mm/s and 5-micron layer decrements. The gear is both dimensionally accurate and has little recast material.…”

Section: A12 Comparison Of Parameter Sets For Component Fabricationmentioning

confidence: 99%

Section: A231 Effects Of Polarization Onmentioning

confidence: 99%

Microfabrication with femtosecond laser processing : (A) laser ablation of ferrous alloys, (B) direct-write embedded optical waveguides and integrated optics in bulk glasses.

Guo¹,

McDaniel²,

Palmer³

et al. 2004

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“…Bragg gratings are distributed feedback (DFB) gratings that consist of a periodically varying refractive index pattern written along the waveguide Using an aluminum negative shadow mask, multimode, embedded strip waveguides were also produced [44]. The use of a negative mask structure was required given the negative photo-induced refractive index change exhibited by the low substrate temperature materials, thereby exposing the cladding regions of the strips to the UV illumination.…”

Section: B Photoimprinted Bragg Gratings and Embedded Strip Waveguidesmentioning

confidence: 99%

Photosensitive point defects in optical glasses: Science and applications

Potter

Simmons-Potter

2000

Nuclear Instruments and Methods in Physics Research Section B:

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photosensitivity,The understanding and manipulation of the point defect structure in oxide glasses have been critical to the enhanced performance and reliability of optical-fiber-based, photosensitive photonic devices that currently fmd widespread application in telecommunications and remote sensing technologies. We provide a brief review of past research investigating photosensitive mechanisms in germanosilicate glasses, the primary material system used in telecommunications fibers. This discussion motivates an overview of ongoing work within our laboratories to migrate photosensitive glass technologies to a planar format for integrated photonic applications. Using reactive-atmosphere, RFmagnetron sputtering, we have demonstrated control of glass defect structure during synthesis, thereby controlling both the material photosensitivity (i. e. dispersion and magnitude of the refractive index change) and its environmental stability.

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“…A variação negativa no índice de refração (An<ü) gerada por efeitos fotoinduzidos em filmes é relacionada com o deslocamento do bandgap para maiores energias (fotoclareamento), como descrito pelas relações de Kramers-Kronig [85,165].…”

Section: Modelo Para Fotocontração Baseado Em Centros De Defeitosunclassified

Estudo da mudança estrutural fotoinduzida em filmes de vidros a base de polifosfato de antimônio

Vicente¹,

Simões²

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Photosensitive thin film materials and devices

Cited by 5 publications

References 15 publications

Microfabrication with femtosecond laser processing : (A) laser ablation of ferrous alloys, (B) direct-write embedded optical waveguides and integrated optics in bulk glasses.

Microfabrication with femtosecond laser processing : (A) laser ablation of ferrous alloys, (B) direct-write embedded optical waveguides and integrated optics in bulk glasses.

Photosensitive point defects in optical glasses: Science and applications

Estudo da mudança estrutural fotoinduzida em filmes de vidros a base de polifosfato de antimônio

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