PACS 42.70.Ln, 68.65.Ac Structural transformations, stimulated by illumination or heating are related to the interdiffusion processes in nanolayered structures, which were prepared by cyclic thermal evaporation or magnetron sputtering from Si, Ge, Se semiconductors and some As 2 S 3 , Se x Te 1-x -type chalcogenide glasses. It is shown that the intermixing velocity and the related changes of optical parameters depend on the period of the multilayer and intensity of illumination. Volume extension can be stimulated at the illuminated regions and used for the surface relief formation.Introduction The nano-scale technologies provide new possibilities of creating materials and devices with peculiar characteristics for micro-and optoelectronics. Stability of nanostructured systems strongly depends on the interdiffusion processes, which in turn can be used for solid-state synthesis of multicomponent materials, optical recording [1,2]. Compositionally modulated multilayers are attractive for these purposes because of the rather simple technology and modeling of physical processes. Amorphous multilayers (AML) are of special interest due to the elimination of the misfit problems, but the explanation of some physical effects, for example quantum confinement, blue shift of the absorption edge, diffusion on nano-scale are rather indefinite up today [3,4]. Investigations of the well-known photo-stimulated structural transformations (PST) in amorphous chalcogenide semiconductor films [5,6] were extended to the nanolayered systems [4,7] and gave a new insight to the mechanism of light-stimulated structural transformations within sensitive amorphous sub-layers of AML. Light-stimulated interdiffusion processes are possible in Si, Ge as well as in Se and chalcogenide-glass containing AML [8]. These can be used for amplitude-phase optical recording due to the changes of optical transmission, reflection and refraction index in the illuminated region of the AML. Surface reliefs also can be produced due to the deviation from Vegard's law in intermixed systems [1,8]. Stimulated intermixing depends on the temperature and the intensity of illumination, which also can heat up the layer. A model of surface relief formation due to the interdiffusion and the influence of illumination intensity on the amplitude recording process in three typical AMLs (a-Se/As 2 S 3 , As 6 Se 94 /Se 80 Te 20 , a-Si/Ge) are discussed in this paper.