2007
DOI: 10.1063/1.2409765
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Photothermal, Photocarrier and Raman Characterization of Te-doped GaSb

Abstract: Noncontact, nonintrusive photocarrier (PCR) and photothermal radiometry (PTR) as well as Raman spectroscopy were used to characterize GaSb and Te-doped GaSb wafers used to grow GaSb-based heterostructures for infrared applications. The results indicated excellent sensitivity of PTR and PCR to the Te distribution on the wafer surface. The results from the three methodologies were consistent and indicated that the Te was segregated toward the edge of the GaSb wafer. The PTR and PCR laser-based techniques show gr… Show more

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Cited by 11 publications
(8 citation statements)
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“…The methodology employed to obtain the PCR amplitude and phase images of the samples was recently reported [12]. The PCR images were generated by moving two micro-stages in the x-y direction.…”
Section: Characterizationmentioning
confidence: 99%
See 2 more Smart Citations
“…The methodology employed to obtain the PCR amplitude and phase images of the samples was recently reported [12]. The PCR images were generated by moving two micro-stages in the x-y direction.…”
Section: Characterizationmentioning
confidence: 99%
“…These images were taken at a modulation frequency of 10 kHz which showed favorable signal contrast. A schematic diagram of the PCR system used to perform the measurements on the sample has been reported elsewhere [12]. An intensity-modulated diode laser, 532 nm, was used as the excitation source.…”
Section: Characterizationmentioning
confidence: 99%
See 1 more Smart Citation
“…The control of the doping distribution across low-doped n-type wafers is extremely challenging and a subject of recent studies. The crystalline quality and the optical and electronic properties of Te-doped GaSb had been characterized using different characterization techniques, such as infrared transmission [4,5,6], Hall measurements [7], photothermal radiometry and Raman spectroscopy [8] and others.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, the distribution of impurities in the semiconductor is an important aspect in the manufacture of integrated circuits. Photo-carrier radiometry (PCR) is a new powerful technique that has been used to obtain different electronic transport parameters such as recombination lifetime, front and back surface recombination velocities, carrier diffusion coefficient [1,2], and the distribution of the impurities on semiconductor wafers [3]. Unlike other photothermal techniques like photothermal radiometry (PTR) or photo-modulated thermoreflectance (PMOR), PCR is only sensitive to the recombination of free photo-excited carrier density waves [1].…”
Section: Introductionmentioning
confidence: 99%