2004
DOI: 10.1002/pip.540
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Photovoltaics literature survey (no. 29)

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“…3 Their insulating and mechanical properties are also key factors for improving wear resistance and durability of the antireflective coatings. 3 4 Moreover, TiO 2 films have applications in dye sensitized photovoltaic cells, 5 as well as biomaterials. 6 Many techniques have been used to prepare TiO 2 and Al 2 O 3 films, but after a series of developments, like unbalanced magnetrons, magnetically linked magnetrons, pulsing mid-frequency power supplies and feedback controlled dosing of reactive gases, the reactive sputtering techniques have emerged as one of the most promising ones.…”
Section: Introductionmentioning
confidence: 99%
“…3 Their insulating and mechanical properties are also key factors for improving wear resistance and durability of the antireflective coatings. 3 4 Moreover, TiO 2 films have applications in dye sensitized photovoltaic cells, 5 as well as biomaterials. 6 Many techniques have been used to prepare TiO 2 and Al 2 O 3 films, but after a series of developments, like unbalanced magnetrons, magnetically linked magnetrons, pulsing mid-frequency power supplies and feedback controlled dosing of reactive gases, the reactive sputtering techniques have emerged as one of the most promising ones.…”
Section: Introductionmentioning
confidence: 99%