2006
DOI: 10.1002/pip.711
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Photovoltaics literature survey (no. 45)

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“…Deposition of TiO x was performed using either chemical or physical vapour techniques , and its use extended beyond that of the solar industry, most prominently in glass manufacturing as a protection coating deposited using ultra‐high throughput techniques . Despite its ideal optical properties, TiO x was replaced by hydrogenated silicon nitride (SiN x ) since the evolution of silicon solar cells required appropriate passivation of the cells front surface, and this could not be accomplished using TiO x . As mentioned in previous sections, PECVD SiN x is today's preferred method to provide passivation and antireflection to the cell front surface.…”
Section: Materials and Methods For Silicon Surface Passivationmentioning
confidence: 99%
“…Deposition of TiO x was performed using either chemical or physical vapour techniques , and its use extended beyond that of the solar industry, most prominently in glass manufacturing as a protection coating deposited using ultra‐high throughput techniques . Despite its ideal optical properties, TiO x was replaced by hydrogenated silicon nitride (SiN x ) since the evolution of silicon solar cells required appropriate passivation of the cells front surface, and this could not be accomplished using TiO x . As mentioned in previous sections, PECVD SiN x is today's preferred method to provide passivation and antireflection to the cell front surface.…”
Section: Materials and Methods For Silicon Surface Passivationmentioning
confidence: 99%