Surface properties of modern materials are usually inadequate in terms of wettability, adhesion properties, biocompatibility etc., so they should be modified prior to application or any further processing such as coating with functional materials. Both the morphological properties and chemical structure/composition should be modified in order to obtain a desired surface finish. Various treatment procedures have been employed, and many are based on the application of non-equilibrium gaseous media, especially gaseous plasma. Although such treatments have been studied extensively in past decades and actually commercialized, the exact mechanisms of interaction between reactive gaseous species and solid materials is still inadequately understood. This special issue provides recent trends in nanostructuring and functionalization of solid materials with the goal of improving their functional properties.