Physical Characteristics of the Modified Glow Discharge Ion Source

Abstract

This work is concerned with a study on the operating characteristics of a self-axial extraction-type glowdischarge ion source. This compact ion source, with conical anode of various divergence angle Θ, can work under different operating conditions. An output ion beam currents I b were measured at a distance dcc = 5 cm from the plane cathode, and were found to be dependent upon the gas pressure p, angle Θ and the discharge current I d . High ion beam currents of 85 µA and 410 µA were obtained at the optimum angle Θ = 30• for discharges: [N2 gas, p = 2.9 × 10 −2 mbar, I d = 2 mA] and [H2 gas, p = 7.7 × 10 −2 mbar, I d = 2 mA], respectively.

Characterization and analysis of N2 plasma DC glow discharge at different voltage

“…The secondary electrons are accelerated away from the cathode and can lead to further ionization because of the collisions caused by these electrons. As a result, these collisions create ion-electron pairs, and this ion-electron multiplication in the presence of sufficient excitation potential makes the glow discharge process a selfsustaining plasma [7]. The research aims to study the properties of DC glow discharge plasma for gas of different pressures, where the effect of gas pressure on plasma parameters, such as voltage in the focus of the plasma, properties, and electrical conductivity of glow discharge as well as light emission from the discharge at the applied voltage and different pressures has been studied.…”