Physical properties of a:DLC films and their dependence on parameters of deposition and type of substrate

Maharizi, M.; Segal, Ori; Ben‐Jacob, Eshel; Rosenwaks, Y.; Meoded, T.; Croitoru, N.; Сейдман, А.

doi:10.1016/s0925-9635(99)00003-5

Cited by 13 publications

(6 citation statements)

References 15 publications

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“…162 The roughness of DLC films has been shown to depend on the various deposition methods 163,164 and deposition parameters such as ion energy, [165][166][167][168][169][170] gas mixture 163 and bias voltage. 169 Coating roughness is also dependent on substrate material [171][172][173] and the underlying substrate roughness. Increasing the substrate temperature during deposition results in a higher proportion of sp 2 bonding, creating a more graphitic and therefore rougher surface.…”

Section: Film Roughnessmentioning

confidence: 99%

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Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Hainsworth¹,

Uhure²

2007

International Materials Reviews

184

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There are numerous types of surface coatings available to engineers in order to improve the friction and wear resistance of components. In order to successfully use these coatings in practice, it is important to understand the different types of coatings available, and the factors that control their mechanical and tribological properties. This paper will focus on the application of diamond-like carbon (DLC) coatings in tribological applications. Thus far, DLC coatings have found broad industrial application, particularly in optical and electronic areas. In tribological applications, DLC coatings are now being used successfully as coatings for ball bearings where they decrease the friction coefficient between the ball and race, in shaving applications where they increase the life of razor blades in wet shaving applications, and increasingly in automotive applications such as racing engines and standard production vehicles.The structure and mechanical properties of DLC coatings are dependent on the deposition method and the incorporation of additional elements such as nitrogen, hydrogen, silicon and metal dopants. These additional elements control the hardness of the resultant film, the level of residual stress and the tribological properties. As diamond-like carbon films increasingly become adopted for use in industry, it is important to review the factors that control their 2 of 42 DLC Reviewproperties, and thus, the ultimate performance of these coated components in practical tribological applications.

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Section: Film Roughnessmentioning

confidence: 99%

“…The incorporation of fluorine in DLC films has been investigated [156][157][158][159][160] and found to increase the hydrophobicity of DLC as it has the effect of lowering the surface energy of the resultant film, although films with a high fluorine content suffer by way of increased mechanical instability, resulting in reduced hardness and modulus.…”

mentioning

confidence: 99%

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Hainsworth¹,

Uhure²

2007

International Materials Reviews

184

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“…To provide conformal treatment of 3D conductive workpieces, higher plasma density (5-10)×10 10 cm −3 and low voltage 0.5-1 kV at high PRR 10-70 kHz were used. In a case of such small pulse amplitude, the pulse width, τ p , has a minor effect on the coating conformity because the sheath almost reaches a steady-state Child extent within just (10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20)…”

Section: Methodsmentioning

confidence: 99%

“…The film roughness and wettability can be controlled by variation of pulsed bias amplitude and sample temperature. Very smooth DLC films with average roughness of less than 1Å were deposited at optimum process parameters which makes the processing attractive for large-size nanopattern transfer technology [13,14].…”

Section: Pimentioning

confidence: 99%

DLC Coatings by PI³D: Low-Voltage žersus High-Voltage Biasing

et al. 2009

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Diamond-like carbon (DLC), in particular hydrogenated amorphous carbon (a-C:H) films have been formed on various conductive and dielectric materials by plasma immersion ion implantation and deposition (PI 3 D) processing. Effect of pulse voltage and other process parameters on the film properties was investigated. It was found that for conductive substrates, a low-voltage (≈ 1 kV), high repetition rate pulsing provides better overall film performance comparing to that obtained by applying higher voltages, which is also favourable for conformal treatment of 3D workpieces. However, short 1-2 µs, high-voltage 5-20 kV pulses are required for dielectric workpieces several millimeter thick. Good film adhesion was achieved by forming a Si-containing buffer layer using hexamethyldisiloxane (HMDSO) as a precursor and a low-voltage pulsing. Roughness and wettability of DLC coatings was found to be controlled by varying the bias specs and sample temperature. Very smooth films with average roughness less than 1Å were prepared at optimised process parameters.

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“…Doubleside coating on polymer web eliminated its rolling-up due to intrinsic stress of DLC film (patent pending) and was used for microspeaker membrane fabrication. Novel interior RF antenna with capacitively coupled electrode we developed for ICP (patent pending), minimizes contamination due to antenna sputtering thus making the processing prospective for more sophisticated applications like surface smoothing [17], formation of DLC antisticking coating on nanoimprint moulds [18], using DLC layer as antiwear nanoimprint template [19], other DLC coatings on big size substrates for micro and nano pattern transfer technology. …”

Section: Methodsmentioning

confidence: 99%

PI³D processing of DLC coatings for different applications

Никифоров

Ryoo

et al. 2008

Phys. Status Solidi (c)

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DLC (a ‐C:H) and Si‐DLC coatings have been deposited on various materials (steel, aluminium, silicon, glass, polymers) using a 1‐m3 interior‐antenna ICP PI3D facility with HMDSO and toluene as precursors. For conformal treatment of 3‐D workpiececs, a low‐voltage (0.5 ‐ 1) kV, high repetition rate (up to 70 kHz) pulsing was applied. However, DLC formation on dielectric substrates was performed at higher (2 ‐ 10) kV voltage using short (1 ‐ 1.5) μs pulses to minimize surface charging. Coating adhesion was achieved by formation of multi layer structure comprising Si‐containing buffer layer, transient layer, DLC layer with gradually increasing hardness, and top hard DLC. Film hardness was (5 ‐ 20) GPa, and the deposition rate (4 ‐ 0.5) μm/h. DLC surface roughness was (0.7 ‐ 60) nm and water contact angle 70° ‐ 110° depending on process parameters which implies various applications. Batch processing of sliding parts, cutting tools, glass moulds was performed. Double‐side DLC coating on polymer web eliminated its rolling up due to the coating stress. With novel ICP antenna the DLC processing is promising for large‐scale nano pattern transfer technology. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Physical properties of a:DLC films and their dependence on parameters of deposition and type of substrate

Cited by 13 publications

References 15 publications

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

DLC Coatings by PI³D: Low-Voltage žersus High-Voltage Biasing

PI³D processing of DLC coatings for different applications

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Physical properties of a:DLC films and their dependence on parameters of deposition and type of substrate

Cited by 13 publications

References 15 publications

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications

DLC Coatings by PI3D: Low-Voltage žersus High-Voltage Biasing

PI3D processing of DLC coatings for different applications

Contact Info

Product

Resources

About

DLC Coatings by PI³D: Low-Voltage žersus High-Voltage Biasing

PI³D processing of DLC coatings for different applications