2020
DOI: 10.1088/2053-1591/ab688d
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Physical properties of indium zinc oxide and aluminium zinc oxide thin films deposited by radio-frequency magnetron sputtering

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Cited by 8 publications
(8 citation statements)
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“…Finally, the strong signal of the Au (111) diffraction plane from Figure 5c is related to the Au-coated Si substrate employed in the preparation of CdTe by ECD. The XRD data recorded in symmetric theta-theta geometry around the CdTe (111) crystalline plane are presented in Figure 6 together with the theoretical curves obtained by fitting the experimental data with a Voigt profile [13,40,41]. The residual of the fit procedure is shown at the bottom of each graph.…”
Section: Structural Characterizationmentioning
confidence: 99%
“…Finally, the strong signal of the Au (111) diffraction plane from Figure 5c is related to the Au-coated Si substrate employed in the preparation of CdTe by ECD. The XRD data recorded in symmetric theta-theta geometry around the CdTe (111) crystalline plane are presented in Figure 6 together with the theoretical curves obtained by fitting the experimental data with a Voigt profile [13,40,41]. The residual of the fit procedure is shown at the bottom of each graph.…”
Section: Structural Characterizationmentioning
confidence: 99%
“…In a variety of works, the respective concentration or amount of indium is more than 80% in the total concentration of the precursor. In preparation of indium zinc oxide thin films by radio frequency magnetron sputtering, the ratio of In: Zn was kept at 90:10 wt.% [29]. In an attempt to prepare boron-doped indium-boron-zinc-oxide (IBZO) thin films by spin-coating deposition, indium concentration was kept at 70% [30].…”
Section: Precursor Solution Preparationmentioning
confidence: 99%
“…Optical studies of mixed transition-metal oxide films are routinely implemented with UV/VIS/NIR transmission spectrophotometry, which was also reported for IZO films prepared by different routes [ 11 , 17 , 18 ]. The transparency in the VIS range was found to depend on both the In:Zn ratio and the crystallinity.…”
Section: Introductionmentioning
confidence: 99%
“…For crystalline IZO, the transmittance was found to increase with an increasing content of In, reaching values of >95% for the In 0.06 Zn 0.94 O stoichiometry [ 17 ]. For amorphous IZO films with a In:Zn ratio of 5.5:1, prepared by magnetron sputtering without post-deposition heating, the transmittance is <90% [ 18 ]. For the films with a In:Zn ratio of 7:3 prepared by spin coating, the transmittance of 82–85% was found not to depend so much on the annealing temperature, but rather to decrease slightly with the number of deposition layers [ 11 ].…”
Section: Introductionmentioning
confidence: 99%