Physical properties of nitrogenated amorphous carbon films produced by ion-beam-assisted deposition

Rossi, François; André, Bernard; Veen, A. van; Mijnarends, P.E.; Schüt, H.; Labohm, F.; Delplancke, Marie Paule; Dunlop, H.; Anger, E.

doi:10.1016/0040-6090(94)90299-2

Cited by 83 publications

(14 citation statements)

References 26 publications

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“…[25][26][27] Urotropine or HMTA ͑C-N, sp 3 hybridization͒, exhibits a C 1s BE at 286.9 eV ͓287.3 eV for hexamethylenetetramine ͑HMTA͔͒ 17,28-30 and a N 1s BE at 399.4 eV. The deconvoluted peaks from the C 1s spectra at Ϸ287 eV ͑C1͒ and from the N 1s spectra at Ϸ399 eV ͑N1͒ could also be assigned to CwN bonds 16,18,26,31 but the binding energy of the peak C1 in both the samples ͓Figs. 3͑a͒ and 3͑b͔͒ is at 287.2 eV which is much closer to the values 286.8 and 287.3 eV of materials with sp 3 configuration with respect to the value 286.4 eV of polyacrylonitrile ͑CwN bonds͒.…”

Section: A Core Level X-ray Photoelectron Spectroscopymentioning

confidence: 85%

“…We found out that the N/C ratio increases with the laser fluence in the range 5-12 J/cm 16 have presented a review on the different explanation of the contributions to the N 1s and C 1s core level lines. A common observation in almost all recent XPS works on CN x films [17][18][19][20][21] is that the N 1s core level can be deconvoluted in two peaks located around binding energies of 398 and 401 eV, a third peak at about 402 eV related to N-O bonds can also be present. The deconvolution of the C 1s line seems to be more controversial for different reasons.…”

Section: A Core Level X-ray Photoelectron Spectroscopymentioning

confidence: 98%

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Composition and chemical bonding of pulsed laser deposited carbon nitride thin films

Comin¹,

Chevrier²,

Bonnot³

2000

Journal of Applied Physics

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We studied composition, structure, and growth parameters of amorphous diamond-like carbon ͑DLC͒ and carbon nitride (CN x ) films deposited by pulsed laser deposition in vacuum and in nitrogen atmosphere. The composition (0рN/Cр0.4), the structural and the electronic properties of the deposited carbon and carbon nitride films were investigated for different laser fluences ͑1-12 J/cm 2 ͒. Electron energy loss spectroscopy, x-ray photoelectron spectroscopy, and micro-Raman spectroscopy indicated an increase in sp 3 -bonded carbon sites in the DLC films and an increase in N-sp 3 C bonded sites in the CN x films with increasing deposition laser fluence. Raman spectroscopy also showed the presence of a small amount of CwN bonds in the CN x films. Furthermore, we observed that keeping the nitrogen pressure constant ( Pϭ100 mTorr͒ the increase in the deposition laser fluence is reflected by an increase in the nitrogen content in the films. All the results have been discussed in the framework of different theoretical models.

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Section: A Core Level X-ray Photoelectron Spectroscopymentioning

confidence: 85%

Section: A Core Level X-ray Photoelectron Spectroscopymentioning

confidence: 98%

Composition and chemical bonding of pulsed laser deposited carbon nitride thin films

Comin¹,

Chevrier²,

Bonnot³

2000

Journal of Applied Physics

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“…Different authors [8,50,53] has assigned the peaks of XPS N 1s envelopes of their a-CN x films is at 398.3 and 400 eV to N atom bonded to sp 3 -C atom (N-sp 3 C) and N atom bonded to sp 2 -C atom (N-sp 2 C), respectively. The deconvoluted peaks from the XPS C 1s spectra at $287 eV and from the XPS N 1s spectra at $399 eV could also be assigned to C"N bonds [20,43,[54][55][56].…”

Section: Discussionmentioning

confidence: 99%

X-ray photoelectron spectroscopy studies on the bonding properties of oxygenated amorphous carbon nitride thin films synthesized by pulsed laser deposition at different substrate temperatures

Rusop

Soga

Jimbo

2005

Journal of Non-Crystalline Solids

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“…To further complicate the situation, there is a wide range of chemical shifts reported in the literature for common reference materials used for spectral feature identification. 6,[8][9][10] In order to minimize this problem, we identified subpeaks based on the work of Siegbahn et al 10 since they provide a published source which lists experimental chemical shift information, with corresponding theoretical calculations, from a single instrument for all materials of interest.…”

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confidence: 99%

Interpretation of x-ray photoelectron spectra of elastic amorphous carbon nitride thin films

Holloway

Kraft

Shuh

et al. 1999

Applied Physics Letters

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We report the synthesis and characterization of amorphous carbon nitride (CNx) thin films using a direct current magnetron reactive sputter system. Nanoindentation of the CNx films and amorphous carbon films deposited under similar conditions shows the CNx films are extremely elastic, that the addition of nitrogen fundamentally changes the mechanical properties of the films, and that traditional methods of calculating the hardness and Young’s modulus may not be valid. X-ray photoelectron spectroscopy (XPS) of the N(1s) and C(1s) core levels show multiple bonding arrangements. In a new interpretation of the XPS data, the two predominant N(1s) spectral features have been identified, based on comparison to reference data in the literature, as those belonging to nitrogen in a four-bond arrangement and nitrogen in a three-bond arrangement, independent of hybridization. The formation of a fourth bond allows nitrogen to substitute for C atoms in a carbon-based graphitic system without the formation of dangling bonds or unfilled states. The relationship between nitrogen incorporation in a carbon-based ring structure and measured film properties is rationalized based on previously published models.

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Physical properties of nitrogenated amorphous carbon films produced by ion-beam-assisted deposition

Cited by 83 publications

References 26 publications

Composition and chemical bonding of pulsed laser deposited carbon nitride thin films

Composition and chemical bonding of pulsed laser deposited carbon nitride thin films

X-ray photoelectron spectroscopy studies on the bonding properties of oxygenated amorphous carbon nitride thin films synthesized by pulsed laser deposition at different substrate temperatures

Interpretation of x-ray photoelectron spectra of elastic amorphous carbon nitride thin films

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