2015 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2015
DOI: 10.1109/sispad.2015.7292340
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Physical simulation of Si-based resistive random-access memory devices

Abstract: Abstract-We present a newly-developed three-dimensional (3D) physical simulator suitable for the study of resistive random-access memory (RRAM) devices. We explore the switching behavior of Si-rich silica (SiOx) RRAM structures, whose operation has been successfully demonstrated experimentally at ambient conditions [1]. The simulator couples self-consistently a simulation of oxygen ion and electron transport to a self-heating model and the 'atomistic' simulator GARAND. The electro-thermal simulation model prov… Show more

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Cited by 5 publications
(2 citation statements)
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“…3. Two important aspects of the simulator need to be highlighted: (i) using a fundamental understanding of vacancy generation to extract important parameters such as activation energies and diffusion barriers (not used in our previous work [9], [10]), and (ii) integrating an advanced structure generator into the simulation framework, which allows the generation of a simulation structure of any arbitrary geometry and material profile. The structure editor is particularly useful when studying realistic SiO x RRAM structures incorporating siliconrich areas (defect rich areas or areas with Si nano-inclusions [2]) in the oxide, as is the case here.…”
Section: Simulation Methodsmentioning
confidence: 99%
“…3. Two important aspects of the simulator need to be highlighted: (i) using a fundamental understanding of vacancy generation to extract important parameters such as activation energies and diffusion barriers (not used in our previous work [9], [10]), and (ii) integrating an advanced structure generator into the simulation framework, which allows the generation of a simulation structure of any arbitrary geometry and material profile. The structure editor is particularly useful when studying realistic SiO x RRAM structures incorporating siliconrich areas (defect rich areas or areas with Si nano-inclusions [2]) in the oxide, as is the case here.…”
Section: Simulation Methodsmentioning
confidence: 99%
“…This assumption has been tested by an extended version of the model presented in [8] towards the defect formation. The formation of point defects is included using the rate equation (1), see [15,16]. The simulation result changes then with a variable number of defects within the electrolyte, cf.…”
Section: Long Time Scale Investigationmentioning
confidence: 99%