Physical-to-Logical Mapping of Emission Data using Place-and-Route

Enhanced wafer analysis using a combination of test, emission and software net tracing

“…Consequently, optical techniques are limited since the actual failure point would be "upstream" from the transistors manifesting the emission. Although the emission data is collected, it does not identify the defect site so we used CAD data to continue [4]. To take full advantage of CAD data, layout was operated by NEXS software with net tracing ability.…”