2020
DOI: 10.1016/j.ceramint.2020.04.168
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Physical vapor deposition technology for coated cutting tools: A review

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Cited by 184 publications
(89 citation statements)
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“…18,19 The technique was selected owing to its versatility, allowing the deposition of thin films from a variety of materials including metals, ceramic and polymers. [20][21][22] The technique is also already established at an industrial scale in electronic, automotive and biomedical sectors, which will facilitate potential upscaling of this fabrication process. 18,20 After the deposition, the PVA template was dissolved in hot water, leaving well-aligned and self-supporting arrays of hollow metal nanostructures (Fig.…”
Section: Resultsmentioning
confidence: 99%
“…18,19 The technique was selected owing to its versatility, allowing the deposition of thin films from a variety of materials including metals, ceramic and polymers. [20][21][22] The technique is also already established at an industrial scale in electronic, automotive and biomedical sectors, which will facilitate potential upscaling of this fabrication process. 18,20 After the deposition, the PVA template was dissolved in hot water, leaving well-aligned and self-supporting arrays of hollow metal nanostructures (Fig.…”
Section: Resultsmentioning
confidence: 99%
“…As a significant surface modification technology, magnetron sputtering has been widely used in various fields. Magnetron sputtering, divided into direct current (DC) magnetron sputtering and radio frequency (RF) magnetron sputtering by the power supply type that is one of the PVD methods ( Yan et al, 2018 ; Deng et al, 2020 ). This method utilizes the plasma phenomenon to bombard the target material in order to separate metal atoms from the surface of the target and deposit a thin film on the substrate surface.…”
Section: Fabrication Methods Of Titanium Based Heasmentioning
confidence: 99%
“…PVD technology is highly used due to low temperature of procedure, environmental compatibility, and chemical composition control in addition to the structure of coating. 22 Among the vapor deposition techniques (including vapor, sputtering, and hybrid techniques), cathodic arc evaporation (CAE-PVD) that is a subset of vapor techniques, has advantages such as producing high-adhesion coatings. It has low cost, ionization speed, and high speed of deposition.…”
Section: Introductionmentioning
confidence: 99%
“…Vapor deposition processes can be classified into chemical vapor deposition (CVD) and PVD according to process principles. PVD technology is highly used due to low temperature of procedure, environmental compatibility, and chemical composition control in addition to the structure of coating 22 . Among the vapor deposition techniques (including vapor, sputtering, and hybrid techniques), cathodic arc evaporation (CAE‐PVD) that is a subset of vapor techniques, has advantages such as producing high‐adhesion coatings.…”
Section: Introductionmentioning
confidence: 99%