2015
DOI: 10.1088/0741-3335/58/1/014033
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Physics of the Advanced Plasma Source: a review of recent experimental and modeling approaches

Abstract: The Advanced Plasma Source (APS), a gridless hot cathode glow discharge capable of generating an ion beam with an energy of up to 150 eV and a flux of 10 19 s −1 , is a standard industrial tool for the process of plasma ion-assisted deposition (PIAD). This manuscript details the results of recent experimental and modeling work aimed at a physical understanding of the APS. A three-zone model is proposed which consists of (i) the ionization zone (the source itself) where the plasma is very dense, hot, and has a … Show more

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Cited by 5 publications
(5 citation statements)
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“…The ion gyroradius, in contrast, amounts to at least several cm and is therefore of the same magnitude as L and λ. All scales, however, exceed the Debye length l = 1 is higher than all other frequencies, except the electron plasma frequency w = pe --10 10 s 11 12 1 , while the gyrofrequencies of the ions are negligibly small. Such plasmas must be described in the frame of kinetic theory: each participating species s (of mass m s and charge q s ) is represented by a phase space distribution function ( )…”
Section: Introductionmentioning
confidence: 89%
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“…The ion gyroradius, in contrast, amounts to at least several cm and is therefore of the same magnitude as L and λ. All scales, however, exceed the Debye length l = 1 is higher than all other frequencies, except the electron plasma frequency w = pe --10 10 s 11 12 1 , while the gyrofrequencies of the ions are negligibly small. Such plasmas must be described in the frame of kinetic theory: each participating species s (of mass m s and charge q s ) is represented by a phase space distribution function ( )…”
Section: Introductionmentioning
confidence: 89%
“…Partially magnetized plasmas play an important role in numerous technological applications. Examples reach from magnetically enhanced glow discharges over various types of magnetron sources to Hall effect thrusters [1][2][3][4]. The physical regimes of these plasmas are quite similar: the magnetic field in the active region is around = -B 10 100 mT, and they are operated at relatively low pressure, = p 0.1 1 Pa, and high plasma density, = -n 10 10 m e 18 20 3 .…”
Section: Introductionmentioning
confidence: 99%
“…Magnetized low temperature plasmas such as Hall effect thrusters, DC or RF magnetrons, and magnetically enhanced glow discharges are widely used in technology and industry [1][2][3][4][5][6]. They operate at low pressures, p = 0.1-1 Pa, and high plasma densities, n e = 10 18 -10 20 m −3 .…”
Section: Introductionmentioning
confidence: 99%
“…Partially magnetized plasmas, using external magnetic field B perpendicular to applied electric field E to confine electrons and generate high plasma density in low pressures, represent an advanced plasma source in technology and industry, such as magnetrons, Hall effect thrusters and magnetically enhanced glow/arc discharges [1,2,3,4,5]. These discharges feature magnetized electrons subject to the E×B confinement (electron Larmor radius ρ e is smaller than the plasma size L, ρ e < L) and non-or weakly magnetized ions (ion Larmor radius ρ i L), which are accelerated almost collisionlessly in the applied electric field for the application purpose.…”
Section: Introductionmentioning
confidence: 99%