Picosecond-Laser 4-Beam-Interference Ablation as a Flexible Tool for Thin Film Microstructuring

Voisiat, Bogdan; Gedvilas, Mindaugas; Indrišiūnas, Simonas; Račiukaitis, Gediminas

doi:10.1016/j.phpro.2011.03.113

Cited by 55 publications

(34 citation statements)

References 3 publications

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“…Voisiat et al also employed a diffractive optical element (DOE) to split the laser irradiation into four beams and they pointed out that the DOE is a key element of experiment setup [10]. The laser source was a picosecond laser Foxtrot (Ekspla Ltd.) with the wavelength of 1064nm and pulse duration of 60ps and the spot where interference of beams took place was 475 m in diameter.…”

Section: Experimental Aspectmentioning

confidence: 99%

Direct laser interference technology and potential applications

Yue

Wang

Zhang

et al. 2014

2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3m-Nano)

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Development of direct laser interference technology JR3CN and CNM play key roles of the formation of patterns in the multi-beam e another are al (DLIT) is reviewed in this paper. With the merits of being Direct Laser Interference Technology and Potential Applications independent on the pretreatment, mask and pattern transfer processes, DLIT is demonstrated a facile and efficient method of producing sub-micro structures on various material surfaces. From a representative perspective, a number of past achievements, containing theoretical and practice aspects, attained by the nanosecond, picosecond, and femtosecond laser interference techniques are introduced. Advantages and limitations in comparison to on so addressed. With the progress of the emerging subwavelength structures (e.g. metasurfaces, plasmonic structures) offering the fascinating possibility of controlling the behaviour of light in an unprecedented way, the perspectives of potential applications benefited from DLIT are finally given. picosecond and femtosecond interference.

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Section: Experimental Aspectmentioning

confidence: 99%

Direct laser interference technology and potential applications

Yue

Wang

Zhang

et al. 2014

2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3m-Nano)

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“…Among them, four-beam laser interference lithography is the most extensively investigated technology. 16,[25][26][27][28][29][30][31][32][33][34] Theoretically, four-beam laser interference could generate evenly distributed periodic structure patterns, but in practice, noticeable modulations were almost unavoidably introduced in interference patterns due to the misalignment of incident angles or unequal incident angles, 25,31-33 which is not desired for many applications.…”

Section: Effects Of Polarization On Four-beam Laser Interference Lithmentioning

confidence: 99%

Effects of polarization on four-beam laser interference lithography

Wang¹,

Wang²,

Zhang³

et al. 2013

Applied Physics Letters

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This paper demonstrates that polarization plays an important role in the formation of interference patterns, pattern contrasts, and periods in four-beam interference lithography. Three different polarization modes are presented to study the effects of polarization on four-beam laser interference based on theoretical analysis, simulations, and experiments. A four-beam laser interference system was set up to modify the silicon surface. It was found that the secondary periodicity or modulation was the result of the misaligned or unequal incident angles only in the case of the TE-TE-TM-TM mode. The resulting patterns have shown a good correspondence with the theoretical analysis and simulations.

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“…6,7 Pulsed laser sources with different pulse duration and wavelength were studied in order to determine laser parameters' effect on the realized pattern. 8,9 In particular, feature quality and size, which are crucial in biomedical applications, were investigated as function of laser fluence and number of pulses. [9][10][11][12][13] Surface texture in micro-and nano level as well as chemistry should be controlled to tailor the biological performance of the implant.…”

Section: Introductionmentioning

confidence: 99%

Two-beam interference patterning of biodegradable magnesium alloy: Influence of number of passes and spots overlap

Furlan

Biondi

Demir

et al. 2017

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Laser based texturing methods provide enhanced surface properties exploitable, especially in biomedical applications. Direct writing methods allow for processing features in tens of micrometers in size due to the use of diffraction limited beams. Feature size can be further reduced exploiting the light interference combined with the pulsed laser ablation. In this work, an industrial grade single mode nanosecond-pulsed green fiber laser was used to realize two-beam direct laser interference patterning system. The system was employed on a biodegradable Mg alloy to test the feasibility of the approach for submicrometric patterning. The combination of low melting point and high thermal conductivity of Mg alloy with the use nanosecond pulses generates difficulties in terms of the machining quality. The influence of number of pulses and number of passes was evaluated on the patterned area diameter as well as the pattern periodicity. Finally, patterned regions were overlapped on a scanned line to assess the feasibility of the process on larger areas.

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Picosecond-Laser 4-Beam-Interference Ablation as a Flexible Tool for Thin Film Microstructuring

Cited by 55 publications

References 3 publications

Direct laser interference technology and potential applications

Direct laser interference technology and potential applications

Effects of polarization on four-beam laser interference lithography

Two-beam interference patterning of biodegradable magnesium alloy: Influence of number of passes and spots overlap

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