2021
DOI: 10.1016/j.mechatronics.2021.102543
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PID-type sliding mode-based adaptive motion control of a 2-DOF piezoelectric ultrasonic motor driven stage

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Cited by 24 publications
(15 citation statements)
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“…When the system encounters uncertain disturbances, the feedforward controller cannot adapt in time. Therefore, the feedforward and feedback algorithm are generally combined to form a compound controller [13,14], which can compensate for the hysteresis and eliminate the system disturbance at the same time, as shown in Figure 12. The PID method is simple and practical and is often chosen to be used in the compensation control of the piezoelectric stage [1,2,14].…”
Section: Experiments and Discussionmentioning
confidence: 99%
See 3 more Smart Citations
“…When the system encounters uncertain disturbances, the feedforward controller cannot adapt in time. Therefore, the feedforward and feedback algorithm are generally combined to form a compound controller [13,14], which can compensate for the hysteresis and eliminate the system disturbance at the same time, as shown in Figure 12. The PID method is simple and practical and is often chosen to be used in the compensation control of the piezoelectric stage [1,2,14].…”
Section: Experiments and Discussionmentioning
confidence: 99%
“…Therefore, the feedforward and feedback algorithm are generally combined to form a compound controller [13,14], which can compensate for the hysteresis and eliminate the system disturbance at the same time, as shown in Figure 12. The PID method is simple and practical and is often chosen to be used in the compensation control of the piezoelectric stage [1,2,14]. The tuning of PID parameters follows the Ziegler-Nichol method and the comprehensive setting method based on the error performance index, especially for the middle part of the hysteresis curve, because the error of this part is relatively large in the whole hysteresis stage.…”
Section: Experiments and Discussionmentioning
confidence: 99%
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“…Therefore, the mounting errors could be reduced by improving the reference tracking accuracy, just for the slave motor on the fly. There are some motion control methods to improve the position accuracy for single motor motion [10][11][12]. Feedback controllers are usually used to implement motion control in order to improve the tracking accuracy, including proportion-integration-differentiation (PID) control, robust control, and sliding mode control (SMC), etc.…”
Section: Introductionmentioning
confidence: 99%