Pierce oscillator circuit topology for high motional resistance CMOS MEMS SAW resonator

Karim, Jamilah; Nordin, Anis Nurashikin; Alam, Ahm Zahirul; Hashim, U.

doi:10.1109/smelec.2012.6417135

Cited by 2 publications

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technology have become a potential substitute for quartz crystal resonator (Karim et al 2012;Masri and Shao 2013;reichenbach et al 2006; Wu et al 2012).capacitive MeMS resonator (also known as electrostatic MeMS resonator) is the type of MeMS resonator studied and researched maturely and widely. Its frequency can be more than Mhz and quality factor can be close to even reach the level of the crystal resonator (chandorkar et al 2008).

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confidence: 99%

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Design of a novel RF MEMS square resonator

et al. 2014

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technology have become a potential substitute for quartz crystal resonator (Karim et al. 2012;Masri and Shao 2013;reichenbach et al. 2006; Wu et al. 2012).capacitive MeMS resonator (also known as electrostatic MeMS resonator) is the type of MeMS resonator studied and researched maturely and widely. Its frequency can be more than Mhz and quality factor can be close to even reach the level of the crystal resonator (chandorkar et al. 2008). The product of frequency and quality factor in the electrostatic MeMS resonator based on poly-silicon can reach 3.9 × 10 13 (Wang et al. 2004). nguyen and his team have begun to study devices based on electrostatic MeMS resonators from 2,000; Jing Wang and others developed the disk MeMS resonators that was frequency of 1.156 Ghz and the quality factor was more than 2,650 in 2004, which was fabricated by surface micromachining process (lee et al. 2009). In 2009 lee and others made frequency of 5.166 Mhz, the quality factor of 3.7 × 10 6 lame modal square resonator based on SOI technology (chen et al. 2011).The electrostatic MeMS resonator has many advantages, however, it also exists a lot of problems: first of all, effective vacuum packaging is needed to maintain high quality factor (akgul et al. 2009); second, high motional resistance (far greater than resistance of quartz crystal resonator) (Demirci et al. 2003). a new kind of MeMS resonators with a movable electrode is proposed so that 500 nm gap can be realized by the traditional etching technology in the paper, to effectively reduce motional resistance. Theory and analysis of RF MEMS resonatorsrF MeMS resonator equivalent impedance is called working motional resistance, its expression is given by Demirci et al. (2003):Abstract a novel kind of rF MeMS square resonator with a movable electrode structure that is driven by electrostatic force is proposed. Within the scope of the fabrication process allowed, the gap between the movable electrode and resonance square is decreased from 2.5 to 0.5 μm, which greatly reduces motional resistance so that resonator is easier to resonate. Then the Dc driving voltage that makes electrode move setting displacement is deduced theoretically. The finite element simulation and analysis software anSYS are used to validate mechanical vibration modal and determine center frequency of resonator. In addition, simulation of harmonic analysis is applied to obtain the change of output current and motional resistance before and after the electrode moving. Moreover, the design can also, to a certain extent, ease the difficulty of manufacturing the small gap in the micro-processing technology.

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confidence: 99%

“…technology have become a potential substitute for quartz crystal resonator (Karim et al 2012;Masri and Shao 2013;reichenbach et al 2006; Wu et al 2012).…”

mentioning

confidence: 99%