PbTiO 3 nanoislands were epitaxially grown on Pt/SrTiO 3 (100) by self-assembly using metalorganic chemical vapor deposition. The width and height of PbTiO 3 nanoislands ranged from 30 to 200nm, and from 2 to 30nm, respectively. Piezoelectric constant (d 33,PFM ) measured by piezoresponse force microscopy (PFM) rapidly decreased with the height when the height was less than 10nm, suggesting intrinsic size effects. PFM also revealed that the domain configuration was dependent on the width of nanoislands. The critical width for single domain was found to be 50nm.