2009
DOI: 10.1017/s1759078709000166
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Piezo-controlled microwave devices

Abstract: At present, millimeter wave fast tunable components are required for telecommunication systems, car collision prevention radar, etc. The only mechanical way of control inserts practically no loss in the frequency agile system. That is why micro-electromechanical systems devices are being studied intensively. In an overview, an alternative way – piezo-electromechanical tuning of microwave components – is reported.

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Cited by 1 publication
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“…The fifth paper (Ikehashi et al [5]) outlines a lithographical bending control method for piezoelectric actuator fabrication for MEMS applications. The correlation of capacitive RF-MEMS reliability to AlN is discussed by Papandreou et al [6] while Poplavko et al [7] show the use of piezoelectric materials in building tunable microwave devices.…”
mentioning
confidence: 99%
“…The fifth paper (Ikehashi et al [5]) outlines a lithographical bending control method for piezoelectric actuator fabrication for MEMS applications. The correlation of capacitive RF-MEMS reliability to AlN is discussed by Papandreou et al [6] while Poplavko et al [7] show the use of piezoelectric materials in building tunable microwave devices.…”
mentioning
confidence: 99%