2024
DOI: 10.3390/s24206764
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Piezo-VFETs: Vacuum Field Emission Transistors Controlled by Piezoelectric MEMS Sensors as an Artificial Mechanoreceptor with High Sensitivity and Low Power Consumption

Chang Ge,
Yuezhong Chen,
Daolong Yu
et al.

Abstract: As one of the most promising electronic devices in the post-Moore era, nanoscale vacuum field emission transistors (VFETs) have garnered significant attention due to their unique electron transport mechanism featuring ballistic transport within vacuum channels. Existing research on these nanoscale vacuum channel devices has primarily focused on structural design for logic circuits. Studies exploring their application potential in other vital fields, such as sensors based on VFET, are more limited. In this stud… Show more

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