Piezoelectric Actuators and Motors: Materials, Designs, and Applications

Abstract

especially irreplaceable role in the area of precision actuations, such as in lens driving in optical assemblies and optical communication, micro/nanopositioning in semiconductor and microelectromechanical system (MEMS) manufacturing, nanoscanning probes in scanning electron microscopy, etc. [1,2] Due to the huge market demand for piezoelectric actuators, the progress of piezoelectric materials and devices is new every year. New piezoelectric material compositions, novel fabrication processes and full assessments of materials are widely studied to improve the material properties or make devices more suitable for actuation applications. Pb(Zr,Ti)O 3 (PZT)-based ceramics are still dominant in the market because of their high piezoelectric properties, low cost, and stable thermal performance. Although single crystals' piezoelectric and electromechanical coupling coefficients show great advances compared with ceramics, actuation applications are limited to only some special cases due to high cost of single crystals. [3] Lead-free ceramics have also experienced fast development, and some compositions have been found to exhibit large strains, but they also result in large energy losses under high electric fields. This type of ceramic may have potential for use in nonresonant actuator applications. Additionally, various actuation configurations operating via different working modes or mechanisms have been developed.In this review, we first introduce materials used for the corresponding actuators and motors, and then, recent developments in the area of actuators including nonresonant multilayer ceramic actuators, step motors and inertial motors, and resonant ultrasonic motors, such as linear motors, rotary motors, multi-DOF motors, and MEMS actuators, are discussed. Actuation performance parameters such as the stroke length, resolution, loading force, velocity, lifetime, and power efficiency are the main concerns. We try to clarify and compare differences between devices. Finally, the challenges and outlook for the piezoelectric actuators are discussed. Piezoelectric Materials for ActuatorsPiezoelectricity in materials can be attributed to an asymmetric center of the crystalline structure or molecular chain, which Piezoelectric actuators are unique driving force-generation devices, which can transfer input electric energy into force, displacement, or movement outputs efficiently and precisely via piezoelectric effect-based electromechanical coupling instead of electromagnetic induction. In comparison with traditional electromagnetic actuators, the most important features of the piezoelectric actuators are their compact size, flexible design, and ability to provide nanometer or sub-micrometer positioning. Here, recent progress in nonresonance piezoelectric actuators including multilayer ceramic actuators, step motors, inertial motors, and resonance ultrasonic motors, such as linear motors, rotary motors, multidegree of freedom motors, and microelectromechanical system actuators, is comprehensively presented. The working p...

Lead Free Multilayer Piezoelectric Actuators by Economically New Approach

“…High temperature piezoelectric devices/transducers and piezoelectric nano-generators are desirable for next generation to monitor the health of appliances, equipment and engines used at elevated temperatures (Zhang and Yu, 2011;Lv et al, 2020). Some leadfree multilayers are fabricated by different approaches (Gao et al, 2015(Gao et al, , 2019Koo et al, 2020;Lv et al, 2020). Nonetheless, Zhu et al claimed best performance transducer made of 0.96(K 0.48 Na 0.52 )(Nb 0.95 Sb 0.05 )O 3 -0.04Bi 0.5 (Na 0.82 K 0.18 ) 0.5 ZrO 3 (0.96KNNS-0.04BNKZ) lead free complex composition by a novel phase-boundary engineering (NPB) method.…”

“…In addition to this, Cu-Ag co-fired (Bi 0.37 Na 0.37 Sr 0.26 )TiO 3 (BNST) were reported with higher inversepiezoelectricity, as key properties given in the Table 1 (Koo et al, 2020). As Compared to the electromagnetic actuators; the miniaturized multilayer-piezoelectric-actuators are non-resonant type with large out-put of force at low applied voltages, containing negligible electromagnetic noises and up to sub-nanometer resolutions in displacement (Uchino, 2008;Koji et al, 2010;Gao et al, 2019). Consequently, replacement piezoelectric compositions are sought, a leading candidate of which is potassium sodium niobate (KNN) (Zhang et al, 2013;Ibn-Mohammed et al, 2016; FIGURE 1 | Flow diagram of five-electrode-layers by wet method multilayer (WMM), (a) screen printing of inner electrode, (b) stacking procedure with spraying, (c) stacking view, (d) sample marking/cutting, (e) cross-sectional inner electrode views with real sample, and (f) partial secondary electrode of Ag.…”

“…Wang et al, 2016;Yang et al, 2016;Ibn-Mohammed et al, 2017;Hussain et al, 2018Hussain et al, , 2019. KNN has the added potential of being safe for deployment as internal medical devices, expanding its potential range of piezoelectric applications to biosensors and internal motors/pumps (Uchino, 2008;Koji et al, 2010;Zhang and Yu, 2011;Gao et al, 2015Gao et al, , 2019Hussain et al, 2018;Koo et al, 2020).…”

Tailoring Artificial Mode to Enable Cofired Integration of Shear‐type Piezoelectric Devices

“…Generally, piezoelectric devices are designed into polymorphic configurations such as unimorph, [26,27] bimorph, [28,29] moonie, or other metal/ceramics laminated forms [30,31] to meet specific actuation and sensing demands. [32,33] The monolith multilayer structure is able to accumulate piezoelectric strain or charge of each superimposed piezoceramic layer in a very limited volume. [34][35][36] Stacked-disk method [35] and piezoceramic cofired method [36] are main approaches to obtain multilayer devices.…”

Piezoelectric and pyroelectric properties of Mn-doped 0.36Pb(In1/2Nb1/2)O3–0.36Pb(Mg1/3Nb2/3)O3–0.28PbTiO3 ceramics

“…The first-generation relaxor ferroelectrics, which are represented by (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMNT) and (1-x)Pb(Zn1/3Nb2/3)O3-xPbTiO3 (PZNT) single crystals, have been widely used in sonar transducers, actuators, energy harvesting and resonators, due to their excellent piezoelectric performance (electromechanical coupling factor k33 ~ 92%, piezoelectric coefficient d33 ~ 2500 pC/N) [1][2][3][4][5][6][7]. However, the relatively low rhombohedral to tetragonal phase transition temperature (Trt ~ 60-95 ℃) and Curie temperature (TC ~ 130-170 ℃) limit their usage temperature range [8][9][10][11].…”