Piezoelectric AlN Films for FPW Sensors with Improved Device Performance

Reusch, Markus; Holc, Katarzyna; Kirste, Lutz; Katus, P.; Reindl, L.; Ambacher, O.; Lebedev, V.

doi:10.1016/j.proeng.2016.11.518

Cited by 3 publications

(3 citation statements)

References 3 publications

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“…63,203,204 AlN, which also has the wurtzite structure, is also an inorganic piezoelectric material that has been successfully fabricated as a sensor. 205,206 There are many kinds of piezoelectric materials, from inorganic to organic, natural to synthetic. These piezoelectric materials exhibit different advantages and disadvantages.…”

Section: Piezoelectric Materialsmentioning

confidence: 99%

See 1 more Smart Citation

Piezoelectric dressings for advanced wound healing

Dai,

Shao,

Zhang

et al. 2024

J. Mater. Chem. B

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Section: Piezoelectric Materialsmentioning

confidence: 99%

“…63,203,204 AlN, which also has the wurtzite structure, is also an inorganic piezoelectric material that has been successfully fabricated as a sensor. 205,206…”

Section: Piezoelectric Effect and Piezoelectric Materialsmentioning

confidence: 99%

Piezoelectric dressings for advanced wound healing

Dai,

Shao,

Zhang

et al. 2024

J. Mater. Chem. B

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show abstract

“…The preparation of piezoelectric ceramic particles is typically divided into four steps: collection of ingredients, presintering, molding, and high-temperature sintering. (1)(2)(3) The block broken method is the most common method used in production, as it reduces the production cost. This method results in the surface damage of the particles, the multidomain, and the dielectric, as well a reduction in the ferroelectric properties.…”

Section: Introductionmentioning

confidence: 99%

Microanalysis and Piezoelectric Properties Study of Piezoelectric Film Sensors Based on Heat Treatment Process

Yu-dong¹,

Guo²,

Yan³

et al. 2018

Sensors and Materials

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Purchased piezoelectric ceramic particles have a high surface activity, a low dielectric constant, and a low ferroelectric performance. The piezoelectric activity of piezoelectric ceramic particles was further improved by improving the interface bonding state between the piezoelectric ceramic particles and the polymer matrix. In this study, the piezoelectric ceramic particles were treated at a high temperature under nitrogen protection. Crystal forms of the piezoelectric ceramic particles were analyzed via X-ray diffraction (XRD) and scanning electron microscopy (SEM) technologies. The dielectric and piezoelectric properties of the piezoelectric film, which were influenced by the heat treatment process, were the focus of this study. The heat treatment temperature of the piezoelectric ceramic particles was determined, and piezoelectric film sensors were prepared. The applied research of the piezoelectric film sensors was performed via a cantilever beam experiment. The results showed that the heat treatment resulted in the decomposition of strong groups at the piezoelectric ceramic particle surface, the surface activity of the particles decreased, the interface compatibility of the piezoelectric ceramic particles and the polymer matrix was enhanced, the reasonable heat treatment temperature was 1200 ℃, and the piezoelectric film sensors that were used for the real-time monitoring of structures were effective.

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The Design of Aluminum Nitride-Based Lead-Free Piezoelectric MEMS Accelerometer System

Chen

Chu

et al. 2020

IEEE Trans. Electron Devices

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Piezoelectric AlN Films for FPW Sensors with Improved Device Performance

Cited by 3 publications

References 3 publications

Piezoelectric dressings for advanced wound healing

Piezoelectric dressings for advanced wound healing

Microanalysis and Piezoelectric Properties Study of Piezoelectric Film Sensors Based on Heat Treatment Process

The Design of Aluminum Nitride-Based Lead-Free Piezoelectric MEMS Accelerometer System

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