Piezoelectric materials for acoustic wave applications

The influence of design parameters on the performance of FBAR in 10–14 GHz

“…The results show as the frequency increases, the static capacitance gradually increases too for both AlN and ZnO. This can be verified by using equation (6), where the static capacitance is inversely proportional to the thickness of the piezoelectric material. Table 1 and Table 2 summarizes the influence of the resonance area on the electrical impedance, Zin of FBAR using AlN and ZnO respectively.…”

“…The most common piezoelectric materials used for development of FBAR are aluminum nitride (AlN) and zinc oxide (ZnO) [1][2][3][4]. FBARs based on lead zirconate titanate (PZT) and cadmium sulphide (CdS) are also found in the literature [5][6]. CdS has low acoustic impedance and an electromechanical coupling coefficient (~2.4%).…”

Large Pyroelectric Response from Reactively Sputtered Aluminum Nitride Thin Films

“…There are several immediate and potential advantages of AlN over traditional pyroelectric materials. Reactively sputtered AlN has a lower dielectric constant than current commercial PE materials 8,10 and the AlN dielectric constant is relatively temperature insensitive to at least 300°C. 11 The thermal conductivity of AlN is on the order of 100 times higher than traditional PE materials, even at 300°C.…”

Sol-Gel Derived LiNbO₃: Its Crystallization Behavior Analyzed by High-Temperature X-Ray Diffraction Method

“…Lithium niobate (LiNbO 3 , LN) is a double-oxide ferroelectric/piezoelectric material, which is widely applied for electric and optic devices, in particular for surface acoustic wave (SAW) devices [1]. Compared with a representative piezoelectric material, Pb(Zr,Ti)O 3 (PZT), LN shows a much higher Curie temperature (~1200°C) and is lightweight, therefore LN is favorable for high-frequency applications.…”