Piezoelectric MEMS mirrors for the next generation of small form factor AR glasses

Boni, Nicoló; Carminati, Roberto; Mendicino, Gianluca; Merli, Massimiliano; Terzi, Davide; Lazarova, Borka; Fusi, M.

doi:10.1117/12.2609863

Cited by 14 publications

(8 citation statements)

References 10 publications

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“…The utilization of MEMS mirrors can employ various scanning strategies depending on the selected driving methods. Thanks to the unique beam steering capabilities, MEMS mirrors have been applied to various fields including projection displays [5][6][7], LiDAR systems [8][9][10], inspection tools like bio-imaging applications [11][12], laser material processing [13], and quantum technologies (Fig. 3) [14].…”

Section: Introductionmentioning

confidence: 99%

Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

Hwang,

Yarar,

Wysocki

et al. 2024

MOEMS and Miniaturized Systems XXIII

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This paper presents the feasibility of implementing various scan patterns, ranging from quasi-static to resonant driving methods, using newly developed 3D-constructed Al(Sc)N piezoelectric MEMS mirrors. A description of the assembled device and how each driving method was tried and characterized are also provided. According to the quasi-static driving test result, tilting angle of ±10° was achieved by both AlN and AlScN based-MEMS mirrors. For 1D resonant scanning, total optical scan angle (TOSA) of 20° was obtained under the low applied voltage of 1.5 Vpp. Further investigations were conducted on various 2D scan patterns, including Lissajous and circular scans. The characterization results show that Lissajous scan patterns with various field-of-view (FOV) sizes can be realized by adjusting the applied voltage and driving frequencies. In the case of circular scan, a TOSA of 10° was achieved, demonstrating the potential for 360° of omnidirectional scanning using the presented mirror devices. In addition, assessments of the electrical stability of fabricated piezoelectric material under high voltage and the mechanical robustness based on long-term cycling tests were conducted to ensure the reliability of the device. The presented low-power compact Al(Sc)N-based piezoelectric MEMS mirror device possesses a wide range of specifications, affording it the capability for application and customization to meet various purposes, while also holding significant potential for further advancements in its utility.

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Section: Introductionmentioning

confidence: 99%

Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

Hwang,

Yarar,

Wysocki

et al. 2024

MOEMS and Miniaturized Systems XXIII

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“…LBS systems can utilize either two 1D MEMS mirrors (one slow and one fast) or a single 2D MEMS mirror [9][10][11]. The choice of MEMS mirror size is critical and considers factors such as the scanning unit's total footprint, the mirror's tilting or scanning angle defining the field of view (FOV), its resonance frequency determining scanning speed and image frame rate, and its size dictating optical beam size and display system resolution.…”

Section: Introductionmentioning

confidence: 99%

Compact RGB module with blue, green LDs and red SLED and collinearly aligned collimated output beams

Primerov,

Jobson,

Rios

et al. 2024

Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) V

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We introduce an enhanced version of a full-color, RGB hybrid LD-SLED light source module for near-to-eye display systems, predominantly tailored for laser beam scanning (LBS) architectures. This light source module integrates blue and green semiconductor laser diodes (LD) emitting at wavelengths of 455 nm and 520 nm, respectively, along with a red superluminescent diode (SLED) operating at 638 nm. Besides the RGB emitter devices, this micro-RGB module includes collimation optics, wavelength-combining filters, and a prism pair to achieve circular output beams, all packaged with an innovative micro-optical, free-space bench architecture. With a compact footprint of 5.5 mm x 8.6 mm, this module produces collimated, circular, and collinearly aligned RGB beams with minimal divergence and large diameters of 1.0-1.3 mm at the module output. This third generation of an micro-RGB light source module delivers up to 50 mW of optical power per color at a total power dissipation of 1.2 W.

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“…[1][2][3][4][5] Recently, great progress has been made in the development of MEMS-based picoprojector systems to be prospectively implemented in augmented reality (AR) glasses for the consumer market. [6][7][8] However in the maritime context, MEMS-based AR glasses on lab-status 9 or commercially available state-of-the-art augmented-reality glasses often still possess an inconvenient size and weight considering its application for all-day usage, as it would be mandatory on a ship´s bridge. Furthermore, the usage of AR-glasses would limit the information availability to the wearer.…”

Section: Introductionmentioning

confidence: 99%

Efficient piezoelectric gimbal-less MEMS-mirror with large design flexibility

Wysocki

Ratzmann

Schütt

et al. 2023

MOEMS and Miniaturized Systems XXII

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Biaxial resonant MEMS-scanners are considered as promising core-device in state-of-the-art imaging and projection systems due to their compactness, the large field-of-view, high speed, and comparably low power consumption. However, the usage in three-dimensional LIDAR modules or projectors for industrial applications is often limited by non-optimal Lissajous-scanning patterns. To achieve dense and spatially uniform Lissajous-trajectories, a suitable frequency ratio of the two oscillation modes is essential. In previous works, the frequency ratio was either maximized or minimized, which often led either to mechanical fragility or undesirable coupling of the two normal modes. For solving the abovementioned problems, a piezoelectrically-driven biaxial MEMS-scanner exhibiting large design flexibility, enabling the individual tailoring of the two orthogonal rotational oscillation-modes and Lissajous-patterns with large fill factor, was developed. This design freedom and decoupling of two axes motions are achieved by a gimbal-less design with individual actuator systems for the two oscillatory axes. Driven by the CMOS-compatible piezoelectric Al(Sc)N, the Q-factor of the resonant mirror with large optical aperture of 5 mm is enhanced by hermetic wafer-level glass-encapsulation. A projection module, which combines the biaxial MEMS-scanner, an RGB-laser-beam combiner, and the electronics for both read-out and control, was developed in the frame of a funded research project (”MEMS-scanner-based laser projection system for maritime augmented reality”). The target of the project was the development of a smart window, in the sense of a MEMS-scanner-based laser projection system for maritime augmented reality, which offers the possibility to fade in safety-relevant information of navigation and ship sensors into the field-of-view of the bridge personnel on the ship’s bridge. Such projector is promising also for further applications in industry, for instance in 3D cameras.

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Piezoelectric MEMS mirrors for the next generation of small form factor AR glasses

Cited by 14 publications

References 10 publications

Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

Compact RGB module with blue, green LDs and red SLED and collinearly aligned collimated output beams

Efficient piezoelectric gimbal-less MEMS-mirror with large design flexibility

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