TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (
DOI: 10.1109/sensor.2003.1216938
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Piezoelectric microactuators in polymer-composite technology

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Cited by 7 publications
(8 citation statements)
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“…In the case of high parasitic damping δ > k 2 /2, the electrical damping has to be maximized according to equation (19). To simplify the results, the limit δ k 2 is used, and further simplification is possible with k 2 1,…”
Section: Optimum Loadmentioning
confidence: 99%
“…In the case of high parasitic damping δ > k 2 /2, the electrical damping has to be maximized according to equation (19). To simplify the results, the limit δ k 2 is used, and further simplification is possible with k 2 1,…”
Section: Optimum Loadmentioning
confidence: 99%
“…The cantilever suspension is fabricated by laminating together the two PZT ceramics with an epoxy resin in a PDMS mold [20]. All dimensions as well as the characteristic material values are listed in table 1.…”
Section: Fabricationmentioning
confidence: 99%
“…4 an optimum stroke is observed for an equal thickness of the piezo and polymer layer when using the same materials as described in [14]. Based on these and other simulations (not shown here), the membrane actuator was designed with a membrane radius of 8 m m and a piezoelectric disk radius of 7 mm.…”
Section: Design and Mathematical Modelmentioning
confidence: 84%
“…A composed silicone molding form was made for this purpose as shown in fig. 7 and described in [14]. The piezo disc is inserted into the lower segment of the molding form which is closed and subsequently filled with a two component epoxy resin.…”
Section: E475mentioning
confidence: 99%
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