Piezoelectric micropump using dual-frequency drive

Pan, Qianqian; He, L.; Huang, Fanyang; Wang, Xue Yan; Feng, Zhi Hua

doi:10.1016/j.sna.2015.03.029

Cited by 38 publications

(13 citation statements)

References 19 publications

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“…When the studies in Table 2 were investigated, it was seen that Zhang et al (2013aZhang et al ( & 2013b, Pan et al (2015), Okura et al (2017) and Ye et al (2018) used very high AC voltages between 150 V and 400 V. These driving AC voltage levels can be considered very high and risky when the micropumps were considered to be used near the body surface for biomedical related applications. In addition, all the studies mentioned above used a check-valve in their designs.…”

Section: Comparison With the State Of The Artmentioning

confidence: 99%

See 1 more Smart Citation

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

Dereshgi¹,

Yıldız²,

Parlak³

2020

JAFM

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A commercial micropump should provide properties that justify the simple structure and miniaturization, high reliability, simple working principle, low cost and no need for complex controller. In this study, two novel piezoelectric actuated (lead zirconate titanate-PZT) valveless micropumps that can achieve high flow rates by pumping chambers and fixed reservoirs were designed and fabricated. Extensive experiments were conducted to investigate the effects of hydrodynamic and electromechanical on flow rates of the Single Diaphragm Micropump (SDM) and the Bi-diaphragm Micropump (BDM). BDM had two actuators facing to the same chamber at 180-degree phase shift. The primary features of the proposed designs were the high flow rates at low driving voltages and frequencies with the help of innovative design geometry. 3D-printing technique providing one-step fabrication for integrated micropumps with fixed reservoir was used. The micropump materials were biocompatible and can be used repeatedly to reduce costs. Mechanical parameters such as tensile test for silicon diaphragm, surface topography scanning by microscopy techniques and drop shape analysis for hydrophobic property were investigated to reveal surface wetting and flow stability. In addition, the effect of reservoir height was investigated and the calibration flow rates were measured during the inactive periods. The maximum diaphragm displacements were obtained at 45 V and 5 Hz. The maximum flow rate of SDM and BDM at 45 V and 20 Hz were 32.85 ml/min and 35.4 ml/min respectively. At all driving voltage and frequency levels, BDM had higher flow rates than of SDM.

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Section: Comparison With the State Of The Artmentioning

confidence: 99%

“…As a result, the maximum obtained flow rate was 6.21 ml/min. Pan et al (2015) studied on the same micropump done by Wang et al (2014). However, in this study a square wave voltage and sinusoidal wave voltage were used to drive the piezoelectric actuator.…”

Section: Introductionmentioning

confidence: 99%

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

Dereshgi¹,

Yıldız²,

Parlak³

2020

JAFM

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“…In order to prevent infinite deflections when the actuator is excited at its resonant frequency, the governing equation needs to account for the damping effect. After introducing the damping coefficient (C), the governing equation is expressed as (20) To analyze the primary fundamental resonance, the λ can be expressed as, (22) where θ is the detuning factor that describes the nearness of the excitation frequency to the resonant frequency; when θ=0, the resonance occurs and the nonlinear force and external force are small variables compared with the inertial force and linear force, therefore a small parameter is introduced to the Eq. 21, resulting in (23) The method of multiple scales is utilized to solve Eq.…”

Section: Theory Of Vibrationmentioning

confidence: 99%

“…However, the frequency at that range is too high for the fluidic handling devices and may results in a failure. Such as in the micropumps, higher excitation frequency is benefit for the power output of the piezodisc, but too high working frequency may lead to the failure of the mechanical valves [22]. Moreover, too high working frequency may causes tremendous energy loss due to the acoustic radiation [23].…”

Section: Introductionmentioning

confidence: 99%

A theoretical solution of resonant circular diaphragm-type piezoactuators with added mass loads

Liang

Wang

2017

Sensors and Actuators A: Physical

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A theoretical solution is formulated to analyze the vibration behaviors of circular diaphragm-type piezoactuators based on the Hamilton's principle and Rayleigh-Ritz method, which are particular suitable for modeling the deflection of multilayer structures. Each of the actuator three layers is considered as an individual layer in the modeling. The energy associated with the solution includes the kinetic energy of the actuator, the elastic potential energy of the various layers, the electric potential energy in the piezodisc, and the work done by the force of electric filed. The transverse displacement is separated into a time dependence term and a mode shape term, then the vibrational governing equation is derived using the functional variation, and is approximately solved through the method of multiple scales. Moreover, added mass loads are introduced to the diaphragm center for the sake of decreasing the resonant frequency, where many MEMS devices, such as gas micropumps and ejectors, have a higher working efficiency. The proposed analytical solution is validated numerically via the finite element method (FEM) and experimentally via measurements; the theoretical results are found to be in good agreement with the FEM results as well as with the experimental results. Furthermore, the effects of mass loads, geometric dimensions and material properties of the piezoactuator on the resonant frequency are discussed.

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“…[1][2][3] The demand for the application of simple micropumps with a high flow rate and strong pumping pressure that are lightweight and economical has increased in recent years in the fields of chemical analysis, medical devices, fuel cells and microelectronic devices. 3,4 From the perspective of energy conversion, a piezoelectric pump is composed of an excitation source, a vibrator and a chamber. The excitation source provides electrical energy and the piezoelectric element attached to the vibrator converts the electrical energy into mechanical energy.…”

Section: Introductionmentioning

confidence: 99%

Resonant Type Piezoelectric Pump Driven at the Power Frequency Using a Tuning Fork Vibrator

Qing¹,

Jiang²,

Li³

et al. 2020

The International Journal of Acoustics and Vibration

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A resonant type piezoelectric pump driven by a tuning fork vibrator (TFV) is developed in this study. The resonant frequency of the TFV is designed to be the power frequency, thus the pump can directly work in a resonant state under a power frequency power supply. Three factors affecting the performance of the piezoelectric pump are investigated in this paper, including the thickness of the TFV, the material of the pump chamber diaphragm and the quantity of inlet valve. The Taguchi method is adopted to obtain the best combination among the three factors. In accordance with the optimized results of the Taguchi method, a final prototype piezoelectric pump is fabricated via 3D printing technology. When driven by the power frequency power supply, the maximum flow rate of the prototype piezoelectric pump can reach 441.77 ml/min.

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Piezoelectric micropump using dual-frequency drive

Cited by 38 publications

References 19 publications

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

Performance Comparison of Novel Single and Bi-Diaphragm PZT Based Valveless Micropumps

A theoretical solution of resonant circular diaphragm-type piezoactuators with added mass loads

Resonant Type Piezoelectric Pump Driven at the Power Frequency Using a Tuning Fork Vibrator

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