Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators

Ho, G.K.; Abdolvand, Reza; Sivapurapu, A.; Humad, S.; Ayazi, Farrokh

doi:10.1109/jmems.2007.906758

Cited by 190 publications

(93 citation statements)

References 13 publications

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“…Following the procedure reported previously [8,41], we could transform the mechanical response into the electrical response of the actuator, obtaining Equation (3). Moreover, we could obtain Equation (4), which determines the electromechanical coefficient (η n ) from the electrical coefficients and the displacement at resonance.…”

Section: Analysis Of the Elastic Constantmentioning

confidence: 99%

Design and Characterization of In-Plane Piezoelectric Microactuators

et al. 2017

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In this paper, two different piezoelectric microactuator designs are studied. The corresponding devices were designed for optimal in-plane displacements and different high flexibilities, proven by electrical and optical characterization. Both actuators presented two dominant vibrational modes in the frequency range below 1 MHz: an out-of-plane bending and an in-plane extensional mode. Nevertheless, the latter mode is the only one that allows the use of the device as a modal in-plane actuator. Finite Element Method (FEM) simulations confirmed that the displacement per applied voltage was superior for the low-stiffness actuator, which was also verified through optical measurements in a quasi-static analysis, obtaining a displacement per volt of 0.22 and 0.13 nm/V for the low-stiffness and high-stiffness actuator, respectively. In addition, electrical measurements were performed using an impedance analyzer which, in combination with the optical characterization in resonance, allowed the determination of the electromechanical and stiffness coefficients. The low-stiffness actuator exhibited a stiffness coefficient of 5 × 10 4 N/m, thus being more suitable as a modal actuator than the high-stiffness actuator with a stiffness of 2.5 × 10 5 N/m.

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Section: Analysis Of the Elastic Constantmentioning

confidence: 99%

Design and Characterization of In-Plane Piezoelectric Microactuators

et al. 2017

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“…For this reason, the most convenient method of finding the equivalent circuit is through the admittance Y p , defining the actuation (η a ) and sensing (η s ) coupling coefficients, as in Eq. 1 (Ho et al 2008). For a complete modelling of the electrical behaviour of real piezoelectric resonators, a parallel capacitance (C p ) that accounts for the dielectric coupling between the electrodes must be considered.…”

Section: Resonator Modelmentioning

confidence: 99%

Comparison of in-plane and out-of-plane piezoelectric microresonators for real-time monitoring of engine oil contamination with diesel

et al. 2016

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“…29. This structural FBAR requires both signal and ground electrodes being in-plane and parallel on the exposed surface of the PE films [127,128,129]. Since the excitation is parallel to the surface and perpendicular to the normal c-axis crystal orientation, the FBARs exhibit a thickness shear mode operation.…”

Section: Fbar Sensorsmentioning

confidence: 99%