Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon Continuous-Membrane Deformable Mirror

Hishinuma, Yoshikazu; Yang, Eui–Hyeok

doi:10.1109/jmems.2006.872229

Cited by 49 publications

(24 citation statements)

References 13 publications

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“…Though the SCPE has been brought forward theoretically and experimentally for a long time, the influence of the SCPE phenomena are rarely considered in practical devices [6,37,38]. In Eqs.…”

Section: Elemental State-vector Equationsmentioning

confidence: 99%

State space finite element analysis for piezoelectric precision positioning considering secondary converse piezoelectric effect

Zhou

2015

Finite Elements in Analysis and Design

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Section: Elemental State-vector Equationsmentioning

confidence: 99%

State space finite element analysis for piezoelectric precision positioning considering secondary converse piezoelectric effect

Zhou

2015

Finite Elements in Analysis and Design

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“…When a driving voltage is applied to the electrodes, the PZT thin film extends or contracts in the plane of the membrane, thus creating a bending moment to flex the membrane out of its plane. Such PZT thin-film membrane actuators have appeared in many applications including micro pumps [5], deformable mirrors [6], micro speakers [7], energy harvesters [8], and hybrid cochlear implant actuators [9].…”

Section: Introductionmentioning

confidence: 99%

Effects of residual stresses on lead–zirconate–titanate (PZT) thin-film membrane microactuators

Lee

Shen

2010

Sensors and Actuators A: Physical

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“…Recently, lead zirconium titanate (PZT) thin films prepared by sol-gel deposition have been developed for the unimorph microactuator in silicon continuousmembrane DM by using a micromachining process [3]. Typical transverse piezoelectric coefficient d 31 of PZT thin films are in the range of 10-40 pC/N, [4,5] which are much lower than the bulk value around 100-300 pC/N [6].…”

mentioning

confidence: 99%

“…Typical transverse piezoelectric coefficient d 31 of PZT thin films are in the range of 10-40 pC/N, [4,5] which are much lower than the bulk value around 100-300 pC/N [6]. Such thin films type actuators normally achieve displacements of a few microns [3]. When a larger stroke i.e.…”

mentioning

confidence: 99%

Development of piezoelectric actuators for active X-ray optics

et al. 2009

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Piezoelectric actuators are widely utilised in adaptive optics to enable mirrors having an actively controlled reflective surface for the purpose of the wavefront correction by reducing the effects of rapidly changing optical distortion. Two new prototype adaptive X-ray optical systems are under development with the aim of approaching the fundamental diffraction limit. One proposed technology is microstructured optical arrays (MOAs) involving two or four piezoelectric strips bonded to a silicon wafer to produce a micro-focused X-ray source for biological applications, and which uses grazing incidence reflection through consecutive aligned arrays of channels obtained using deep silicon etching. Another technology is large scale optics which uses a thin shell mirror bonded with 20-40 piezoelectric actuators for the next generation of X-ray telescopes with an aim to achieve a resolution greater than that currently available by Chandra (0.5"). PZT-based piezoelectric actuators are being developed in this programme according to the design and implementation of the proposed mirror and array structures. Viscous plastic processing is chosen for the preparation of the materials system, which is subsequently formed and shaped into the suitable configurations. Precise controls on the thickness, surface finish and the curvature are the key factors to delivering satisfactory actuators. Unimorph type piezoelectric actuators have been proposed for the applications and results are presented regarding the fabrication and characterisation of such piezo-actuators, as well as the related design concepts and comparison to modelling work.

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Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon Continuous-Membrane Deformable Mirror

Cited by 49 publications

References 13 publications

State space finite element analysis for piezoelectric precision positioning considering secondary converse piezoelectric effect

State space finite element analysis for piezoelectric precision positioning considering secondary converse piezoelectric effect

Effects of residual stresses on lead–zirconate–titanate (PZT) thin-film membrane microactuators

Development of piezoelectric actuators for active X-ray optics

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