Piezoelectric unimorph valve assembled on an LTCC substrate

Sobociński, Maciej; Juuti, Jari; Jantunen, Heli; Gołonka, Leszek

doi:10.1016/j.sna.2008.11.025

Cited by 29 publications

(14 citation statements)

References 13 publications

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“…2,6,7 In traditional piezoelectric active micro-valve, piezoelectric vibrator is normally used as a valve stopper to keep the channel closed or open directly, since the displacement of piezoelectric vibrator is small, the flow capacity and particle tolerance is low. [8][9][10][11] In order to obtain the structure with large displacement and small size, the micro-valves based on piezoelectric and hydraulic amplification mechanism have been presented. T. Ninomiya et al 12 and X. Arouette et al 13 reported hydraulic amplification mechanism that sealed in a microcavity by two largely deformable polydimethylsiloxane (PDMS) membranes, which has excellent performance in the amplification effect and dynamic characteristics and can be used as micro-valve driving actuator.…”

Section: Introductionmentioning

confidence: 99%

A normally-closed piezoelectric micro-valve with flexible stopper

et al. 2016

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In the field of controlled drug delivery system, there are still many problems on those reported micro-valves, such as the small opening height, unsatisfactory particle tolerance and high cost. To solve the above problems, a novel normally-closed piezoelectric micro-valve is presented in this paper. The micro-valve was driven by circular unimorph piezoelectric vibrator and natural rubber membrane with high elasticity was used as the valve stopper. The small axial displacement of piezoelectric vibrator can be converted into a large stroke of valve stopper based on hydraulic amplification mechanism. The experiment indicates that maximum hydraulic amplification ratio is up to 14, and the cut-off pressure of the micro-valve is 39kPa in the case of no working voltage. The presented micro valve has a large flow control range (ranging from 0 to 8.75mL/min).

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Section: Introductionmentioning

confidence: 99%

A normally-closed piezoelectric micro-valve with flexible stopper

et al. 2016

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“…Actuation of the membrane is accomplished using piezoelectric or electromagnetic principle. A piezoelectric initially open LTCC (low temperature co‐fired ceramics)‐based valve presented by Sobociński et al . consisted of ceramic substrate with fluidic channels, cavity, and valve seat and a steel membrane.…”

Section: Introductionmentioning

confidence: 99%

Electromagnetic Valve Made in Low‐Temperature Co‐Fired Ceramics

Czok

Malecha

Gołonka

2013

Int J Applied Ceramic Tech

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This article describes the technology of the electromagnetic valve made in the LTCC (low temperature co‐fired ceramics). The actuation is supplied by mutual reaction between a 3D coil and a neodymium magnet bonded to flexible membrane. Such solution has many advantages like small power consumption and relatively great attractive forces. The valve is built in a hybrid polymer‐ceramic technology. The microfluidic and coil parts are fabricated in the LTCC technology. The flexible section is manufactured using a PDMS (poly(dimethylsiloxane)) membrane bonded to the ceramic part by plasma oxidation. The magnet is fixed on the membrane surface. The LTCC material was chosen for the sake of chemical durability and possibility of 3D structuration. The PDMS membrane provides simultaneously very good stability and high flexibility.

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“…Thanks to all these advantages, LTCC technology is well established in both low-volume, high-performance and highvolume, low-cost applications. In the last several years, LTCC technology has been applied to the fabrication of miniature sensors, actuators and microfluidic systems [6][7][8]. These LTCCbased microsystems consist of various micromechanical (e.g.…”

Section: Introductionmentioning

confidence: 99%