PiezoNEMS: Semiconductor nanowires and heterostructures for sensing and energy harvesting

Montès, L.; Xu, Xiaogeng; Potié, A.; Bercu, B.; Hinchet, Ronan; Rochette, F.; Ardila, Gustavo; Morfouli, P.; Mouis, M.; Songmuang, R.; Salem, B.; Baron, T.

doi:10.1109/iscdg.2012.6359987

Cited by 1 publication

(1 citation statement)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Thus leading to a few hundreds of mW/cm 3 . Analytic and finite element method have been used to determine the optimized dimensions of the nanowires [2,3], but also to elaborate more sophisticated composite materials to improve even further the performance of nanogenerators. The capping layer can be changed to harder material, with larger dielectric constant such as Al 2 O 3 [4].…”

Section: Piezoelectric Nanowires For Mechanical Harvestersmentioning

confidence: 99%

Energy harvesting from nanostructures

Montès

Tao

Hinchet

et al. 2014

2014 International Symposium on Next-Generation Electronics (ISNE)

Self Cite

View full text Add to dashboard Cite

We present nanostructure based piezoelectric and thermoelectric energy harvesters. Using different forms of nanostructuration (heterostrucutration, composite materials, superlattices) further helps improving the performance of such nanodevices that could be used both as self-powered sensors and nanogenerators with IC compatibility. GaN and ZnO nanowires are used as piezoelectric devices. While a specific AFM method is used to investigate the individual nanowire properties, large area prototypes composed of nanowire arrays are realized to evaluate the performance of such nanogenerators. Bottom-up techniques using industrial tools are also used to grow Si/SiGe quantum dot superlattices, both n and p types, mono-or poly-crystalline to be used as thermoelectric elements where nanostructuration improves the ZT figure of merit. Going even further, for the first time we report the realization of Ti and Mo silicide quantum dot superlattices, both n an p type.

show abstract

Section: Piezoelectric Nanowires For Mechanical Harvestersmentioning

confidence: 99%