Piezoresistive sensor design using topology optimization

Rubio, Wilfredo Montealegre; Silva, Emilío Carlos Nelli; Nishiwaki, Shinji

doi:10.1007/s00158-007-0191-6

Cited by 20 publications

(16 citation statements)

References 31 publications

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“…Both approaches are perfectly sound, but are missing the additional insight a strategy on an intermediate level may provide and seldom discuss how the fundamental geometry was found in the first place. Some research has been conducted in the area of generic topology optimization (see for example [7]). However, no experimental data has been presented.…”

Section: Motivation Of New Design Strategymentioning

confidence: 99%

A5.1 - Design Strategy for a New High-G Accelerometer

Kuells

Nau²,

Bohland³

et al. 2013

Proceedings SENSOR 2013

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Section: Motivation Of New Design Strategymentioning

confidence: 99%

A5.1 - Design Strategy for a New High-G Accelerometer

Kuells

Nau²,

Bohland³

et al. 2013

Proceedings SENSOR 2013

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“…If the above j-th eigenvalue is a repeated eigenvalue, this sensitivity cannot be used, since repeated eigenvalues have only directional derivatives. In this case, the sensitivities are obtained as results from the following eigenvalue problem (Haug et al, 1986;Seyranian et al, 1994;Ohsaki and Ikeda, 2007).…”

Section: Sensitivity Analysismentioning

confidence: 99%

“…Some topology optimization methods for sensor structure have been reported. Pedersen (Pedersen, 2004) and Rubio et al (Rubio et al, 2008) proposed an optimization method for the piezoresistive load cell. However, the topology optimization for multi-axis load cells has not been reported.…”

Section: Introductionmentioning

confidence: 99%

Topology optimization for designing strain-gauge load cells

Takezawa

Nishiwaki

Kitamura

et al. 2010

Struct Multidisc Optim

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Load cells are used extensively in engineering fields. This paper describes a novel structural optimization method for single-and multi-axis load cell structures. First, we briefly explain the topology optimization method that uses the solid isotropic material with penalization (SIMP) method. Next, we clarify the mechanical requirements and design specifications of the single-and multi-axis load cell structures, which are formulated as an objective function. In the case of multi-axis load cell structures, a methodology based on singular value decomposition is used. The sensitivities of the objective function with respect to the design variables are then formulated. On the basis of these formulations, an optimization algorithm is constructed using finite element methods and the method of moving asymptotes (MMA). Finally, we examine the

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“…Density-based topology optimization (TO) is a powerful design method that has been applied in solving optimization problems in structural mechanics and specifically, the design of MEMS, such as ultra-coherent resonators, 19) compliant mechanisms, 20) RF MEMS switches, 21) and piezoresistive force sensors. 22) TO had also been applied by Pederson 23) to explore the optimal cantilever geometry for surface stress sensing, but the optimized designs obtained at the time suffered from poor manufacturability because of the one-node-connection problem, which is a common numerical artifact in displacement/ stress maximization problems. 24) In this study, we aim to explore highly sensitive while manufacturable designs of piezoresistive microcantilevers by using TO integrated with the robust formulation.…”

Section: Introductionmentioning

confidence: 99%

Tailoring stresses in piezoresistive microcantilevers for enhanced surface stress sensing: insights from topology optimization

Zhuang,

Minami,

Shiba

et al. 2024

Jpn. J. Appl. Phys.

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In assessing piezoresistive microcantilever sensitivity for surface stress sensing, the key is its capacity to translate surface stress into changes in resistance. This change hinges on the interplay between stresses and piezoresistivity. Traditional optimization has been constrained by rudimentary 1D models, overlooking potentially superior designs. Addressing this, we employed topology optimization to optimize of Si(100) microcantilevers with a p-type piezoresistor. This led to optimized designs with up to 30% enhanced sensitivity over conventional designs. A recurrent "double-cantilever" configuration emerged, which optimizes longitudinal stress and reduces transverse stress at the piezoresistor, resulting in enhanced sensitivity. We developed a simplified model to analyze stress profiles in these designs. By adjusting geometrical features in this model, we pinpointed an ideal parameter combination for optimal stress distribution. Contrary to conventional designs favoring short cantilevers, our findings redefine efficient surface stress sensing, paving the way for innovative sensor designs beyond the conventional rectangular cantilevers.

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Piezoresistive sensor design using topology optimization

Cited by 20 publications

References 31 publications

A5.1 - Design Strategy for a New High-G Accelerometer

A5.1 - Design Strategy for a New High-G Accelerometer

Topology optimization for designing strain-gauge load cells

Tailoring stresses in piezoresistive microcantilevers for enhanced surface stress sensing: insights from topology optimization

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