Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits

Chow, Yu-Ting; Chao, Shou-Yen; Jiang, Pei-Cheng; Chang, Chung-Tzu; Zheng, Mei-Yuan; Wang, Mu-Chun; Chang, Cheng-Hsun-Tony; Lin, Chii-Ruey; Chen, Chia-Fu; Liu, Kuo-Wei

doi:10.1109/tsm.2024.3374067

IEEE Trans. Semicond. Manufact.

2024

DOI: 10.1109/tsm.2024.3374067

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Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits

Yu-Ting Chow,

Shou-Yen Chao,

Pei-Cheng Jiang

et al.

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Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits

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References 28 publications

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