PIP process greatly influencing the microstructure and electrical conductivity of polymer-derived SiCN ceramics

Ma, Baisheng; Zhu, Yanchao; Wang, Kewei; Sun, Zhuo

doi:10.1016/j.jallcom.2019.01.102

Cited by 15 publications

(22 citation statements)

References 44 publications

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“…In fact, heat treatment times dramatically influence the conductivity of SiCN ceramics only when the temperature exceeds 1300°C. 17,32 Therefore, the difference in conductivity is mainly caused by the graphitization level of free carbon within dense SiCN ceramics (the infiltrated ceramic parts to be specific), which is higher than that in porous SiCN ceramics.…”

Section: Characterizationmentioning

confidence: 99%

“…16 As a traditional processing route, precursor infiltration and pyrolysis (PIP) process is widely used to fabricate dense PDCs. 17,18 Because the free carbon in infiltrated ceramic parts has a higher graphitization level than that in porous ceramic matrix parts, the conductivity of PDCs can increase after PIP process. 9 Therefore, dense PDCs with high conductivity can be obtained by PIP process.…”

Section: Introductionmentioning

confidence: 99%

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Effect of the graphitization level of the free carbon on the temperature sensitivity of silicon carbonitride‐based pressure sensors

Huang

et al. 2021

J Am Ceram Soc

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The transformation route of polymer to ceramic is also known as polymer-derived ceramics (PDCs), which exhibit excellent thermal stability, 1 oxidation/corrosion resistance, 2,3 creep resistance, 4 and these properties make them one of the best candidate materials for pressure sensors used in the harsh environment, especially in aero-engines. Moreover, PDCs also have excellent electrical properties, such as giant piezoresistivity, 5 low dielectric loss and dielectric constant, 6 and tunable conductivity. 7,8 These unique electrical properties of PDCs are strongly related to two regions in their microstructure: one is the amorphous phase(s) of Si containing, and the other is the amorphous free-carbon area containing defective carbon clusters. [9][10][11] When the pyrolysis temperature is less than 1400°C, the amorphous free-carbon phase of PDCs will experience graphitization process and form nanosized carbon clusters. Because the PDC conduction mechanisms are determined by the morphology and content of the free-carbon phase, the graphitization level of free carbon has an important effect on

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Section: Characterizationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Effect of the graphitization level of the free carbon on the temperature sensitivity of silicon carbonitride‐based pressure sensors

Huang

et al. 2021

J Am Ceram Soc

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“…At present, there are two main methods to improve the mechanical properties of PDCs: doping [5,8,17,70,71] and densification [10,47,72]. As mentioned above, doping is a very important method to functionalize PDCs, and the improvement of mechanical properties is also inseparable from doping.…”

Section: Mechanical Propertiesmentioning

confidence: 99%

Polymer-Derived Si-Based Ceramics: Recent Developments and Perspectives

et al. 2020

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Polymer derived ceramics (PDCs) are promising candidates for usages as the functionalization of inorganic Si-based materials. Compared with traditional ceramics preparation methods, it is easier to prepare and functionalize ceramics with complex shapes by using the PDCs technique, thereby broadening the application fields of inorganic Si-based ceramics. In this article, we summarized the research progress and the trends of PDCs in recent years, especially most recent three years. Fabrication techniques (traditional preparation, 3D printing, template method, freezing casting techniques, etc.), microstructural tailoring mainly via additive doping, and properties (mechanical, thermal, electrical, as well as dielectric and electromagnetic wave absorption properties) of Si-based PDCs were explicated. Meanwhile, challenges and perspectives for PDCs techniques were proposed as well, with the purpose to enlighten multiple functionalized applications of polymer-derived Si-based ceramics.

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“…Owing to the polymer decomposition reaction during ceramic transformation, the release of small molecules of gas, mainly included hydrocarbons, formaldehyde, and carbon monoxide, 24 may produce the free paths of gas release inside the ceramics; therefore, the gas‐tightness of the resultant ceramics may be disastrous. Notably, the polymer‐infiltration‐pyrolysis (PIP) process has shown a great advantage for densification of ceramic fibers or ceramic matrix composites 25–27 . Therefore, an attempt to use the PIP process to realize the PDC pressure sensors with gas‐tightness seemed to be meaningful and valuable.…”

Section: Introductionmentioning

confidence: 99%

“…Notably, the polymer-infiltration-pyrolysis (PIP) process has shown a great advantage for densification of ceramic fibers or ceramic matrix composites. [25][26][27] Therefore, an attempt to use the PIP process to realize the PDC pressure sensors with gas-tightness seemed to be meaningful and valuable.…”

mentioning

confidence: 99%

Fabrication of high‐fracture‐strength and gas‐tightness PDC films via PIP process for pressure sensor application

Liu

Zhang

et al. 2020

J Am Ceram Soc

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High‐fracture‐strength and high‐gas‐tightness thin‐film gas‐pressure sensors were fabricated using a silicon oxycarbonitride polymer‐derived‐ceramic (SiCNO‐PDC) material via a multiple polymer‐infiltration‐pyrolysis (PIP) process. To obtain dense SiCNO ceramic films, two types of liquid polyvinylsilazane (PVSZ) precursors were chosen; a high‐ceramic‐yield precursor with high viscosity (PVSZ‐1) was designed to construct the skeleton of ceramic film, whereas a relatively high‐ceramic‐yield precursor with low viscosity (PVSZ‐2) was designed to infiltrate in ceramic defects. The results confirmed that the PVSZ‐2 can effectively fill both intergranular and intragranular defects of ceramic films pyrolyzed by the PVSZ‐1, and produce the sponge‐like structures with nanosized pores. Although the density of the ceramic films only increased by 2.2%‐5.2% after PIP process, the gas tightness was fundamentally improved, and all ceramic films after PIP process could keep gas‐tight condition without loss of pressure after 72 hours. Similarly, the fracture strengths of the ceramic films after PIP cycles have also been improved, and the value could reach 108 MPa after only three PIP cycles. In addition, because a linear relationship among the load, resonant frequency, and deflection was detected in our ceramic films, the wireless passive gas‐pressure sensors with high‐sensitivity and high‐temperature resistance have been fabricated. It strongly indicates that the ceramic films obtained by our PIP process have real potential to be used as thin‐film gas‐pressure sensing elements in high‐temperature and high‐pressure fields.

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PIP process greatly influencing the microstructure and electrical conductivity of polymer-derived SiCN ceramics

Cited by 15 publications

References 44 publications

Effect of the graphitization level of the free carbon on the temperature sensitivity of silicon carbonitride‐based pressure sensors

Effect of the graphitization level of the free carbon on the temperature sensitivity of silicon carbonitride‐based pressure sensors

Polymer-Derived Si-Based Ceramics: Recent Developments and Perspectives

Fabrication of high‐fracture‐strength and gas‐tightness PDC films via PIP process for pressure sensor application

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