Pitot-Static-Tube-Based Waterflow Sensor for Marine Biologging via Inside Sealing of an Incompressible Liquid

Kishimoto, Takuto; Saito, Ryosuke; Tanaka, Hiroto; Takahashi, Hidetoshi

doi:10.1109/jsen.2021.3094565

Cited by 8 publications

(4 citation statements)

References 30 publications

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“…However, several MEMS force sensors have been developed for swimming animals. In biologging research, pressure and flow sensors utilizing MEMS technology have been developed to measure the swimming depth and waterflow velocity by attaching several sensor units to the bodies of marine animals [ 131 , 132 ]. Meanwhile, swimming animals have sensory organs on their body surfaces that detect hydrodynamic forces, which inspired the development of several MEMS force sensors [ 133 , 134 ].…”

Section: Challenges and Future Workmentioning

confidence: 99%

MEMS-Based Micro Sensors for Measuring the Tiny Forces Acting on Insects

Takahashi

2022

Sensors

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Small insects perform agile locomotion, such as running, jumping, and flying. Recently, many robots, inspired by such insect performance, have been developed and are expected to be smaller and more maneuverable than conventional robots. For the development of insect-inspired robots, understanding the mechanical dynamics of the target insect is important. However, evaluating the dynamics via conventional commercialized force sensors is difficult because the exerted force and insect itself are tiny in strength and size. Here, we review force sensor devices, especially fabricated for measuring the tiny forces acting on insects during locomotion. As the force sensor, micro-force plates for measuring the ground reaction force and micro-force probes for measuring the flying force have mainly been developed. In addition, many such sensors have been fabricated via a microelectromechanical system (MEMS) process, due to the process precision and high sensitivity. In this review, we focus on the sensing principle, design guide, fabrication process, and measurement method of each sensor, as well as the technical challenges in each method. Finally, the common process flow of the development of specialized MEMS sensors is briefly discussed.

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Section: Challenges and Future Workmentioning

confidence: 99%

MEMS-Based Micro Sensors for Measuring the Tiny Forces Acting on Insects

Takahashi

2022

Sensors

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“…Thus, if the inner diameter of the sensor's needle is sufficiently bigger than the cantilever, then pressure can be detected from the cantilever without impairing sensitivity, regardless of the needle membrane characteristics. 23 With a piezoresistive cantilever, sensitivity of the cantilever itself may decline depending on the fluid viscosity. 24 In addition, deformation of the cantilever is suppressed by the parylene membrane formed on its backside.…”

Section: δ𝑃 = 𝑘δ𝑍 𝑘mentioning

confidence: 99%

Section: Principle and Designmentioning

confidence: 99%

Needle‐type pressure sensor with silicone oil and parylene membrane inside for minimally invasive measurement

Kishimoto,

Agetsuma,

Hoshino

et al. 2023

Elect Comm in Japan

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This paper addresses a pressure sensor for body pressure measurement. Many pressure sensors have been developed for disease treatment in the medical field. However, these sensors require inserting electronic components and other sensor elements via surgical operations, so the measurement physically burdens patients. Hence, we proposed a needle‐type pressure sensor using MEMS (Micro Electro Mechanical Systems) cantilever. The sensor has a needle part with a thin membrane on the tip and is filled with incompressible fluid inside. The fractional resistance of the built‐in piezoresistive cantilever varies according to the pressure change applied to the needle tip. We can measure body fluid pressure with minimal surgery by inserting a simple needle into the target organ. Because the fabricated sensor responded to pseudo‐body pressure changes, it was suggested that the fabricated needle‐type pressure sensor could detect pressure inside the body.

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“…For these largescale measurements, instruments with large geometries were used. However, the development of miniaturized measuring instruments and their extension to several other applications, such as airflow measurements of drones [1], [2], indoor environments [3], [4], and biologging [5]- [7], is growing in recent years. Furthermore, low-wind-speed information is also important in these fields.…”

Section: Introductionmentioning

confidence: 99%

Neural Network-Based Airflow Vector Sensor Using Multiple MEMS Differential Pressure Sensors

2023

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As airflow information is significant in various fields, several airflow measurement devices have been developed. Differential pressure (DP)-type sensors, including pitot tubes, are extensively used because they can directly measure dynamic pressure due to airflow. However, this method has a disadvantage in that it is difficult to measure some wind directions because of the non-monotonic pressure distribution around the device. This study proposes a compact sphere airflow vector sensor using a neural network model that compensates for nonmonotonicity. It consists of three built-in microelectromechanical system (MEMS)based DP sensor elements that simultaneously measure the DPs around the spherical sensor housing. The measured DPs are converted into 2D wind speed and direction using a neural network. The network model was trained using the simulated output of each sensor, and it was confirmed that the proposed design guideline contributed to achieving high accuracy. An airflow sensor was fabricated on the basis of the designed model. A network model was trained using the sensor responses in a wind tunnel experiment. The wind speed and direction accuracies obtained by the neural network model for 2-10 m/s and 0°-359° were 0.24 m/s and 3.62°, respectively. Finally, we demonstrated a drone flight test by attaching the calibrated sensor to a toy drone. This study is expected to contribute to realizing highly accurate low airflow measurement devices.INDEX TERMS Airflow sensor, neural network, differential pressure sensor, machine learning, drone. FIGURE 1. Conceptual diagram of the proposed airflow vector sensor.

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Pitot-Static-Tube-Based Waterflow Sensor for Marine Biologging via Inside Sealing of an Incompressible Liquid

Cited by 8 publications

References 30 publications

MEMS-Based Micro Sensors for Measuring the Tiny Forces Acting on Insects

MEMS-Based Micro Sensors for Measuring the Tiny Forces Acting on Insects

Needle‐type pressure sensor with silicone oil and parylene membrane inside for minimally invasive measurement

Neural Network-Based Airflow Vector Sensor Using Multiple MEMS Differential Pressure Sensors

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