Pixelated phase-mask dynamic interferometer

Millerd, James E.; Brock, Neal; Hayes, John; North-Morris, Michael; Novak, Matt; Wyant, James C.

doi:10.1117/12.560807

Cited by 286 publications

(127 citation statements)

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“…Recently a pixelated interferometer design based on polarization-induced phase shifting was developed (see for example the commercial interferometers marketed by the 4D Technology Corporation). [ Millerd 2004] A version of this interferometer, in a selfreferencing configuration, is shown below in Figure 29. In this interferometer, unpolarized light is incident upon a polarizing plate which allows vertically polarized light to pass through the center circle, ~ λ/D in diameter, and horizontally polarized light to pass through the outer annulus.…”

Section: Methodsmentioning

confidence: 99%

“…Angel 1994] This design must, however, keep the two arms within the coherence length of the light and provide achromatic phase shifts over a modest, 20%, bandwidth. Recently pixilated interferometers [Millerd et al 2004] have been designed which utilize polarizers to provide achromatic phase shifts and when placed in a self-referencing configuration automatically maintain the distance between the reference and signal beams forming the interferogram.…”

Section: Introductionmentioning

confidence: 99%

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Planet Formation Instrument for the Thirty Meter Telescope

Macintosh¹,

Troy²,

Graham³

et al. 2006

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Planet Formation Instrument for the Thirty Meter Telescope

Macintosh¹,

Troy²,

Graham³

et al. 2006

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“…The phase of the interference signal can be shifted by modulating the optical path length of either the reference or the measurement path in defined steps of fractions lower than a quarter of the lights centre wavelength. The phase can also be shifted by using optical polarizers, and the interferogram can be recorded in a single image frame [5]. If the whole surface of the specimen cannot be captured by one image, stitching methods can be used to combine several sub-apertures to form a complete topography.…”

Section: Introductionmentioning

confidence: 99%

Combination of a fast white-light interferometer with a phase shifting interferometric line sensor for form measurements of precision components

et al. 2017

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Modern industrial fabrication processes put high requirements on the quality of the surface form of precision-machined components, e.g. optical lenses or microelectromechanical systems (MEMS). Optical sensors provide high precision non-contact surface measurement to verify these quality requirements, even on fragile surfaces. The low-cost line-scanning interferometer that is presented in this contribution is based on a Michelson interferometer configuration in combination with a high-speed line-scan camera. The sensor can operate in scanning white-light or in optical path length modulation (OPLM) mode. The white-light mode is used to automatically align the sensor perpendicular in the working distance of 13 mm to the surface of the specimen. In OPLM-mode, an oscillating reference mirror and a band-pass filtered light source are used, to measure the form of a radial symmetric specimen with a diameter of up to 25.4 mm with interferometric accuracy. Several overlapping ring-shaped sub-apertures are measured iteratively in different radial positions until the whole surface is scanned. The sub-apertures are stitched together to reconstruct the complete 3D-topography, while overlapping areas can be used to correct movement errors of the scanning axes. This concept is highly adaptive and can be applied to many different specimen geometries e.g. planes, spheres or aspheric glass lenses.

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“…To allow time-resolved measurement, several single-shot phase-shifting techniques have been introduced [21][22][23][24][25][26][27]. The point is the simultaneous acquisition of several interferograms at the expense of a loss in the spatial resolution.…”

Section: Introductionmentioning

confidence: 99%

Single-shot digital holography by use of the fractional Talbot effect

Martínez-León¹,

Araiza-E²,

Javidi³

et al. 2009

Opt. Express

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We present a method for recording in-line single-shot digital holograms based on the fractional Talbot effect. In our system, an image sensor records the interference between the light field scattered by the object and a properly codified parallel reference beam. A simple binary twodimensional periodic grating is used to codify the reference beam generating a periodic three-step phase distribution over the sensor plane by fractional Talbot effect. This provides a method to perform single-shot phase-shifting interferometry at frame rates only limited by the sensor capabilities. Our technique is well adapted for dynamic wavefront sensing applications. Images of the object are digitally reconstructed from the digital hologram. Both computer simulations and experimental results are presented.

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Pixelated phase-mask dynamic interferometer

Cited by 286 publications

References 12 publications

Planet Formation Instrument for the Thirty Meter Telescope

Planet Formation Instrument for the Thirty Meter Telescope

Combination of a fast white-light interferometer with a phase shifting interferometric line sensor for form measurements of precision components

Single-shot digital holography by use of the fractional Talbot effect

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Pixelated phase-mask dynamic interferometer

Cited by 286 publications

References 12 publications

Planet Formation Instrument for the Thirty Meter Telescope

Planet Formation Instrument for the Thirty Meter Telescope

Combination of a fast white-light interferometer with a phase shifting interferometric line sensor for form measurements of precision components

Single-shot digital holography by use of the fractional Talbot effect

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Product

Resources

About

Single-shot digital holography by use of the fractional Talbot effect