Planar aluminum interconnection formed by electrochemical anodizing technique

Surganov, V. F.; Mozalev, Alexander

doi:10.1016/s0167-9317(97)00129-9

Cited by 34 publications

(16 citation statements)

References 6 publications

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“…The spontaneously emerging structure can be improved with the help of more [ 3 ] or less [ 4 , 5 ] complex techniques, which also make it possible to form PAFs with unusual morphology [ 6 ]. Thanks to its “technological plasticity” and the relative simplicity of formation, porous alumina is a promising material for a wide range of applications, such as an electronic product elemental base [ 7 , 8 , 9 , 10 , 11 ], or in various types of sensors and detectors [ 12 , 13 , 14 , 15 , 16 ]. A currently rapidly developing field is the creation of nanoscale structures and composite materials using porous anodic aluminum oxide as a highly ordered nanostructured matrix for the formation of various kinds of functional materials and devices [ 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 ], including nanostructures such as carbon nanotubes, nanodiamonds, and graphene [ 27 , 28 , 29 ].…”

Section: Introductionmentioning

confidence: 99%

Porous Alumina Films Fabricated by Reduced Temperature Sulfuric Acid Anodizing: Morphology, Composition and Volumetric Growth

et al. 2021

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The volumetric growth, composition, and morphology of porous alumina films fabricated by reduced temperature 280 K galvanostatic anodizing of aluminum foil in 0.4, 1.0, and 2.0 M aqueous sulfuric acid with 0.5–10 mA·cm−2 current densities were investigated. It appeared that an increase in the solution concentration from 0.4 to 2 M has no significant effect on the anodizing rate, but leads to an increase in the porous alumina film growth. The volumetric growth coefficient increases from 1.26 to 1.67 with increasing current density from 0.5 to 10 mA·cm−2 and decreases with increasing solution concentration from 0.4 to 2.0 M. In addition, in the anodized samples, metallic aluminum phases are identified, and a tendency towards a decrease in the aluminum content with an increase in solution concentration is observed. Anodizing at 0.5 mA·cm−2 in 2.0 M sulfuric acid leads to formation of a non-typical nanostructured porous alumina film, consisting of ordered hemispheres containing radially diverging pores.

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Section: Introductionmentioning

confidence: 99%

Porous Alumina Films Fabricated by Reduced Temperature Sulfuric Acid Anodizing: Morphology, Composition and Volumetric Growth

et al. 2021

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“…From previous studies, the anodized oxide film shows good hardness and excellent electrical and thermal insulation. Therefore, in the past few decades, many applications such as increasing rigidity of the aluminum alloys to improve the corrosive resistance, abrasive resistance, electrical insulation, and thermal insulation can be applied in capacitor, semiconductor, and aerospace industry [15][16][17][18]. In general, the anodic process efficiency is also affected by the nature of the electrolyte, such as (i) concentration, (ii) pH, (iii) presence of activating anions, (iv) agitation conditions, and (v) electrolyte temperature.…”

Section: Introductionmentioning

confidence: 99%

The Electrical and Mechanical Properties of Porous Anodic 6061‐T6 Aluminum Alloy Oxide Film

Cheng

Chou

2015

Journal of Nanomaterials

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The properties of the growth of the 6061-T6 aluminum alloy oxide were studied using sulfuric acid anodization. The parameters for the manufacturing process include electrolyte categories, electrolyte concentration, and operating voltages. The results showed that the aluminum oxides obtained by anodization process are mainly amorphous structure and the anodic current density is an important factor affecting the rate of response for oxygen and aluminum ions in barrier. In this experiment, polish process is very important to stable the anodic aluminum oxide film and then it will get the better properties of anodic film. Besides, when using sulfuric acid as the electrolyte, the increase of anodic voltage also increases the rate of reaction which increases the mechanical and electrical properties of anodic oxide film, but too large applied anodic voltage will reduce the mechanical and electrical properties of film because of the crack of the anodic oxide film.

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“…In addition, other groups using the same approach [37][38][39]54,57] showed that these systems are very complex due to the ionic current transport resistivity through the anodic oxides of the deposited metallic layer and substrate metal. New superimposed metallic layers were investigated, in which both valve metals are sputter-deposited on a dielectric substrate, using mainly aluminum as the overlying metal over hafnium [58], niobium [59] or tantalum [60]. Recently, much technological interest has been expressed in these new types of superimposed metallic layers, also referred to as doublelayered anodic oxides, for both micro-and nanoelectronics, such as in planarized aluminum interconnection [60], precision thin-film resistors [38], thin-film capacitors [61], and nanostructured field-emission cathodes [62].…”

Section: Electropolishing and Anodizationmentioning

confidence: 99%

“…New superimposed metallic layers were investigated, in which both valve metals are sputter-deposited on a dielectric substrate, using mainly aluminum as the overlying metal over hafnium [58], niobium [59] or tantalum [60]. Recently, much technological interest has been expressed in these new types of superimposed metallic layers, also referred to as doublelayered anodic oxides, for both micro-and nanoelectronics, such as in planarized aluminum interconnection [60], precision thin-film resistors [38], thin-film capacitors [61], and nanostructured field-emission cathodes [62]. It has also been reported that a nanostructured anodic oxide film can be formed from the underlying metal through PAA [38].…”

Section: Electropolishing and Anodizationmentioning

confidence: 99%

Nanostructured Materials Synthesized Using Electrochemical Techniques

Oliveira

Freitas

Mattoso

et al. 2008

Nanostructured Materials in Electrochemistry

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The visualization and/or handling of atom clusters, or even individual atoms, has been achieved during the past 25 years. One of the most practical instruments for this purpose is the tunneling microscope, which was invented during the 1980s. On such a small scale, materials properties are not the same as those of a macroscopicsized substance. The first occasion on which a scientist proposed atom handling was in 1959, when Professor Richard Feynman [1], during a lecture at the California Institute Technology, suggested that in the near future engineers would be able to take atoms and place them exactly where they wanted to, without -of courseinfringing the laws of Nature. Today, Professor Feynmans lecture, which was entitled There is Plenty of Room at the Bottom, is considered a milestone of the current technological and scientific era.We can define nanoscience as the study of the phenomena and handling of structures on the atomic, molecular and macromolecular scale, where at least one dimension is significantly less than the others. And nanotechnology includes the design, characterization, and production of devices and systems on a nanometer scale. This definition of nanotechnology is wide-ranging, it is not a specific technology, all of the techniques based on physics, chemistry, biology, materials science and engineering -and/or using computers -leading to the development of materials and tools in such a way that the common point among them is the reduced dimension in which they operate. Among these applications are: increased storage and processing capacity for computers; the creation of new mechanisms for drug delivery; and the production of materials which are both lighter and more resistant than metals and plastics. Additional benefits of nanotechnology developments include energy saving, environmental protection, and the more efficient use of increasingly scarce raw materials.Today, these new investigations into material fabrication are focused mainly on nanostructured devices or, at least, microdevices. The most-often used technique for j117 Nanostructured Materials in Electrochemistry. Edited by Ali Eftekhari

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Planar aluminum interconnection formed by electrochemical anodizing technique

Cited by 34 publications

References 6 publications

Porous Alumina Films Fabricated by Reduced Temperature Sulfuric Acid Anodizing: Morphology, Composition and Volumetric Growth

Porous Alumina Films Fabricated by Reduced Temperature Sulfuric Acid Anodizing: Morphology, Composition and Volumetric Growth

The Electrical and Mechanical Properties of Porous Anodic 6061‐T6 Aluminum Alloy Oxide Film

Nanostructured Materials Synthesized Using Electrochemical Techniques

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