Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers

Gaathon, Ophir; Hodges, J. S.; Chen, E.H.; Li, L.; Bakhru, Sasha; Bakhru, H.; Englund, Dirk; Osgood, R. M.

doi:10.1016/j.optmat.2012.09.020

Cited by 16 publications

(10 citation statements)

References 40 publications

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“…More relevantly for quantum technologies, the above‐mentioned membranes provide the ideal substrate that guarantees vertical confinement of light in the subsequent fabrication of waveguides, photonic crystals, or ring resonator structures, either with FIB techniques as described below or by electron beam lithography followed by reactive ion etching. Alternatively, the membranes can be employed without further microfabrication steps to take advantage of the either native or implanted color centers that they incorporate …”

Section: Photonic Components In Diamondmentioning

confidence: 99%

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

et al. 2019

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Diamond has attracted great interest as a quantum technology platform thanks to its optically active nitrogen vacancy (NV) center. The NV's ground state spin can be read out optically, exhibiting long spin coherence times of ≈1 ms even at ambient temperatures. In addition, the energy levels of the NV are sensitive to external fields. These properties make NVs attractive as a scalable platform for efficient nanoscale resolution sensing based on electron spins and for quantum information systems. Diamond photonics enhance optical interactions with NVs, beneficial for both quantum sensing and information. Diamond is also compelling for microfluidic applications due to its outstanding biocompatibility, with sensing functionality provided by NVs. However, it remains a significant challenge to fabricate photonics, NVs, and microfluidics in diamond. In this Progress Report, an overview is provided of ion irradiation and femtosecond laser writing, two promising fabrication methods for diamond‐based quantum technological devices. The unique capabilities of both techniques are described, and the most important fabrication results of color center, optical waveguide, and microfluidics in diamond are reported, with an emphasis on integrated devices aiming toward high performance quantum sensors and quantum information systems of tomorrow.

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Section: Photonic Components In Diamondmentioning

confidence: 99%

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

et al. 2019

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“…[115] An alternative approach to fabricate thin diamond membranes without the need to start from already thin material has been introduced in Refs. [116,117] . First, 200 nm stripes are defined using hydrogen silsesquioxane e-beam resist on a bulk diamond.…”

Section: Fabrication Of Nanophotonics Devices From Single Crystal Diamentioning

confidence: 99%

Diamond Nanophotonics

Aharonovich

Neu

2014

Advanced Optical Materials

304

233

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“…This fabrication process involves extensive reactive ion etching (RIE) processing along with complex micromanipulation, resulting in low yield of high quality devices [27]. Ion-slicing approaches [28] present another alternative but entails crystal damage that can be mitigated only via overgrowth techniques [29][30][31].…”

Section: Introductionmentioning

confidence: 99%

Two-dimensional photonic crystal slab nanocavities on bulk single-crystal diamond

Wan

Mouradian

Englund

2018

Applied Physics Letters

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Color centers in diamond are promising spin qubits for quantum computing and quantum networking. In photon-mediated entanglement distribution schemes, the efficiency of the optical interface ultimately determines the scalability of such systems. Nano-scale optical cavities coupled to emitters constitute a robust spin-photon interface that can increase spontaneous emission rates and photon extraction efficiencies. In this work, we introduce the fabrication of 2D photonic crystal slab nanocavities with high quality factors and cubic wavelength mode volumes -directly in bulk diamond. This planar platform offers scalability and considerably expands the toolkit for classical and quantum nanophotonics in diamond.

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Planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers

Cited by 16 publications

References 40 publications

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

Quantum Micro–Nano Devices Fabricated in Diamond by Femtosecond Laser and Ion Irradiation

Diamond Nanophotonics

Two-dimensional photonic crystal slab nanocavities on bulk single-crystal diamond

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