Planar-type micro-electromagnetic actuators using patterned thin film permanent magnets and mesh type coils

Zhi, Chao; Shinshi, Tadahiko; Saito, Mikiko; Katö, Kunio

doi:10.1016/j.sna.2014.10.012

Cited by 23 publications

(13 citation statements)

References 17 publications

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“…Thus, for instance, a planar (Archimedean) spiral microstructure can be used as a micro‐pseudocapacitor, microactuator, resonator, or an electromagnet in lab‐on‐a‐chip systems, and for the study of magnetoinductive waves or levitation . To obtain spiral microstructures, one can use multistage processes including methods of optical and e‐beam lithography, focused‐ion‐beam fabrication, frequently together with etching, deposition, or electroplating, all of which is time‐consuming and expensive.…”

Section: Introductionmentioning

confidence: 99%

Formation of Fe and Fe₂O₃ Microspirals via Interfacial Synthesis

Gulina

Tolstoy

Lobinsky

et al. 2018

Part & Part Syst Charact

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A new method is reported for obtaining microspirals of iron‐based compounds by interfacial interaction. A thin film of Fe(OH)3 is obtained as a result of interaction between an aqueous solution of iron salts and gaseous ammonia. Upon drying, it is transformed into Fe(OH)3 microspirals with a diameter of up to 10 µm. These microspirals can be transformed into Fe2O3 microspirals by annealing in air. As a result of hydrogen reduction, Fe microspirals are formed. Both the annealing in air and that in hydrogen allow the retaining of the morphology. The material synthesized is characterized by electronic microscopy methods, X‐ray diffraction, diffuse reflectance Fourier transform infrared, and Mössbauer and photoelectron spectroscopies. The electrocatalytic properties of the electrode based on Fe2O3 microspirals as a catalyst of hydrogen evolution and the magnetic properties of Fe microspirals are tested. A hypothesis is proposed on the formation of microspirals by the gas–solution interface technique.

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Section: Introductionmentioning

confidence: 99%

Formation of Fe and Fe₂O₃ Microspirals via Interfacial Synthesis

Gulina

Tolstoy

Lobinsky

et al. 2018

Part & Part Syst Charact

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“…Different frequency gives different flow rate. Similar pumping method have been done by Shen M. et.al [14], Zhi C. et.al [18] and Pan T. et.al [15], but the difference is the actuating element by using a rotating magnet, mesh type coils and a DC micromotor to drive the fluid inside a microchannel.…”

Section: Introductionmentioning

confidence: 92%

Characterization of Electromagnetic Valveless Micropump

2017

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This paper presents an electromagnetically-actuated micropump for microfluidic application. The system comprises two modules; an electromagnetic actuator module and a diffuser module. Fabrication of the diffuser module can be achieved using photolithography process with a master template and a PDMS prepolymer as the structural material. The actuator module consists of two power inductors and two NdFeB permanent magnets placed between the diffuser elements. The choice of this actuation principle merits from low operating voltage (1.5 V dc) and the flow direction can be controlled by changing the orientation of the magnet vibration. Maximum volumetric flow rate of the fabricated device at zero backpressure is 0.9756 µLs-1 and 0.4659 µLs-1 at the hydrostatic backpressure of 10 mmH 2 O at 9 Hz of switching speed.

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“…The coil type was not shown in the photo. [14] propose several planar micro-electromagnetic actuators that can be applied in micro-pumps and micro-valves. The various types each consist of a Thin Film Permanent Magnet (TFPM), a micro-coil, and, in some cases, a ferromagnetic layer.…”

Section: Literature Reviewmentioning

confidence: 99%

Design and application of unloaded flat transformers with spiral coils

Yen¹,

Lin²,

Lin³

et al. 2022

J. adv. tec. eng. res.

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The proposed transformer was designed with 􀅫lexible spirals, similar to the Archimedes spiral design, to achieve a thin transformer structure. Soft layered magnetic materials were produced by stacking two or more sets of spiral coils on a plane at a short distance from each other and using suitable spacer materials between these coil sets. Accordingly, an innovative, thin, 􀅫lat, and 􀅫lexible transformer was created, and its functionality was ensured. The speci􀅫ications of the spiral coils were as follows: wire diameter = 20 mil, the gap between turns = 20 mil, number of turns = 40, and thickness = 1 OZ. The transformer was designed with a one-layer or two-layer structure for conducting experiments. Coils were stacked directly to change the coil ratio of the transformer. The substrate material was polyimide, which is 􀅫lexible and can generate a sound when interacting with magnets. The performance of the developed transformer was examined under two coil ratios: 1:1 and 1:2. Different magnetic materials were used between the coil sets to examine the effects of these materials on the transformer performance. Five settings (A-E) were adopted in this study, and the optimal experimental results were obtained in Setting E, and the second-best results were obtained in Setting C. A silicon steel/primary coil/secondary coil/silicon steel structure was used in Setting E. The output voltage and current were 0.22 V and 12.6 mA, respectively, at a coil ratio of 1:1, as well as 0.49 V and 8.7 mA, respectively, at a coil ratio of 1:2. In Setting C, a magnet/primary coil/secondary coil/magnet structure was used, and the output voltage and current were 0.20 V and 9.27 mA, respectively, at a coil ratio of 1:1 as well as 0.46 V and 7.45 mA, respectively, at a coil ratio of 1:2. The experimental results revealed that the performance of a 􀅫lat transformer is mainly affected by the spacing between the primary and secondary coils and not by the magnetic material between two coil sets. The secondary coils generate the maximum voltage and current when the primary and secondary coils tightly 􀅫it together without any spacer material.

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Planar-type micro-electromagnetic actuators using patterned thin film permanent magnets and mesh type coils

Cited by 23 publications

References 17 publications

Formation of Fe and Fe₂O₃ Microspirals via Interfacial Synthesis

Formation of Fe and Fe₂O₃ Microspirals via Interfacial Synthesis

Characterization of Electromagnetic Valveless Micropump

Design and application of unloaded flat transformers with spiral coils

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Planar-type micro-electromagnetic actuators using patterned thin film permanent magnets and mesh type coils

Cited by 23 publications

References 17 publications

Formation of Fe and Fe2O3 Microspirals via Interfacial Synthesis

Formation of Fe and Fe2O3 Microspirals via Interfacial Synthesis

Characterization of Electromagnetic Valveless Micropump

Design and application of unloaded flat transformers with spiral coils

Contact Info

Product

Resources

About

Formation of Fe and Fe₂O₃ Microspirals via Interfacial Synthesis

Formation of Fe and Fe₂O₃ Microspirals via Interfacial Synthesis