Plane holographic varied-line-space grating for DCLS in EUV region

Yan-xiu, 姜岩秀 Jiang; Bayanheshig, 巴音贺希格; Xulong, 赵旭龙 Zhao; Shuo, 杨硕 Yang; Na, 吴娜 Wu

doi:10.3788/ope.20152308.2117

光学精密工程

2015

DOI: 10.3788/ope.20152308.2117

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Plane holographic varied-line-space grating for DCLS in EUV region

姜岩秀 Jiang Yan-xiu¹,

巴音贺希格 Bayanheshig²,

赵旭龙 Zhao Xulong³

et al.

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Plane holographic varied-line-space grating for DCLS in EUV region

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